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材料导报  2024, Vol. 38 Issue (1): 22070075-14    https://doi.org/10.11896/cldb.22070075
  无机非金属及其复合材料 |
金属氧化物半导体MEMS气体传感器研究进展
尹嘉琦1,2, 沈文锋2,3,*, 吕大伍2,3, 赵京龙2,4, 胡鹏飞1, 宋伟杰2,3,*
1 上海大学材料科学与工程学院,上海 200444
2 中国科学院宁波材料技术与工程研究所,浙江 宁波 315201
3 中国科学院大学材料科学与光电子工程中心,北京 100049
4 江西理工大学材料冶金化学学部,江西 赣州 341000
Advances in MEMS Gas Sensors Based on Metal-oxide Semiconductor Materials
YIN Jiaqi1,2, SHEN Wenfeng2,3,*, LYU Dawu2,3, ZHAO Jinglong2,4, HU Pengfei1, SONG Weijie2,3,*
1 School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
2 Ningbo Institute of Material Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang, China
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 Faculty of Materials Metallurgy and Chemistry, Jiangxi University of Science and Technology, Ganzhou 341000, Jiangxi, China
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摘要 随着物联网的快速发展,各领域对气体监测的需求越来越大,基于先进微机电系统(Micro-electro-mechanical systems,MEMS)技术的金属氧化物半导体(Metal oxide semiconductor,MOS)气体传感器在过去几十年里取得了很大发展。MEMS微热板的多样化设计、MOSs纳米结构的多样化以及机器学习算法的出现为MEMS的传感性能以及智能传感系统的构建提供了很大助力。本文从MEMS气体传感器的分类、制备和应用以及传感器阵列的构建等方面综述了金属氧化物半导体MEMS气体传感器的最新研究进展,并对MEMS基气体传感器的发展前景进行了总结和展望。
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尹嘉琦
沈文锋
吕大伍sup>2
3
赵京龙
胡鹏飞
宋伟杰
关键词:  气体传感器  金属氧化物半导体  微机电系统  传感器阵列  智能传感系统    
Abstract: With the rapid development of the Internet of things, there is an increasing demand for monitoring volatile organic chemicals in various fields. Metal-oxide semiconductor (MOS) gas sensors based onadvanced micro-electro-mechanical systems (MEMS) technology have significantly developed in the past few decades. The diverse design of micro hot plates, the diversification of MOS nanostructures, and the emergence of machine learning algorithms have promoted the sensing performance of MEMS sensors and their intelligent sensing systems. This paper will summarize the latest advances in the classification, preparation, and application of MEMS gas sensors and the sensor array. Finally, the deve-lopment prospect of MEMS-based gas sensors is summarized.
Key words:  gas sensors    metal-oxide semiconductor    micro-electro-mechanical system    sensor array    intelligent sensing system
出版日期:  2024-01-10      发布日期:  2024-01-16
ZTFLH:  O659.31  
基金资助: 浙江省自然科学基金项目(LGF22F010008);宁波市自然科学基金项目(202003N4362; 202003N4332)
通讯作者:  沈文锋,中国科学院宁波材料技术与工程研究所副研究员。2000年于东北大学理学院物理专业获得学士学位;2003年于东北大学材料物理与化学专业获硕士学位;2010年2月于中国科学院金属研究所材料科学与工程专业获工学博士学位;2010年3月至今于中国科学院宁波材料技术与工程研究所从事智能传感器件及应用研究。已发表SCI学术论文60余篇,H-Index 指数21,参与撰写中英文专著3本,申请国家发明专利20余项,其中6项专利已由企业进行产业化。wfshen@nimte.ac.cn;
宋伟杰,中国科学院宁波材料技术与工程研究所研究员。2002 年清华大学物理化学专业博士毕业;2002—2006年在日本物质材料研究机构工作,2006 年起加入宁波材料所任研究员,2007 年入选中科院百人计划。主要从事新能源技术、功能材料与纳米器件的研究工作。发表 SCI 论文90余篇,申请中国发明专利50余项。weijiesong@nimte.ac.cn   
作者简介:  尹嘉琦,2020年于南昌大学获得工学学士学位。现为上海大学与中国科学院宁波材料技术与工程研究所联合培养硕士研究生,在沈文锋副研究员的指导下进行研究。目前主要研究领域为室内环境监测应用的智能气体传感器阵列。
引用本文:    
尹嘉琦, 沈文锋, 吕大伍, 赵京龙, 胡鹏飞, 宋伟杰. 金属氧化物半导体MEMS气体传感器研究进展[J]. 材料导报, 2024, 38(1): 22070075-14.
YIN Jiaqi, SHEN Wenfeng, LYU Dawu, ZHAO Jinglong, HU Pengfei, SONG Weijie. Advances in MEMS Gas Sensors Based on Metal-oxide Semiconductor Materials. Materials Reports, 2024, 38(1): 22070075-14.
链接本文:  
https://www.mater-rep.com/CN/10.11896/cldb.22070075  或          https://www.mater-rep.com/CN/Y2024/V38/I1/22070075
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