贵金属钌的制备、性能及应用研究进展

doi:10.11896/cldb.20030168

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Abstract Ruthenium (Ru),precious metal, is widely used in modern industry. In present paper, the preparation methods of Ru bulk materials are introduced firstly. Moreover, the plasticity, machinability, and influence factors are analyzed. The X-ray diffraction used to measure the internal stress is presented. Secondly, the preparation methods of Ru thin films are reviewed. We also present the application of Ru films such as the bonding layer/diffusion barrier layer for copper in integrated circuits, the intermediate layer/seed layer in magnetic recording media, anti-oxidation protective layer materials and electrical contact materials, etc. In the end, the present research shortcomings of Ru are summarized and a vision of its future research trends is made.

Key words： ruthenium preparation method ruthenium thin films industrial application

Published: 30 November 2021

CLC number:

TB31

Fund:National Key Research and Development Program (2017YFB0305503), Yunnan International Cooperation Project(2014IA037),Yunnan Province Institute Special Project (2009CF003),and Yunnan Innovation Team Project (2019HC024).

About author:: Renyao Zhang, graduated from Yunnan Agricultural University in June 2015 with a bachelor's degree in engineering. He is currently a master student of Kunming Institute of Precious Metals, and conducts research under the guidance of Mr. Wen Ming. At present, the main research fields are precious metal sputtering targets.
Ming Wen received his Ph.D degree in Materials Science from the School of Materials Science and Engineering of Shanghai Jiaotong University. He has been worked for Kunming Institute of Precious Metals since he graduated from Shanghai Jiaotong University. His research interest is sputtering targets and related thin films. He has published more than 50 SCI papers recently, including Scripta Materialia,Surface & Coatings Technology, Applied Surface Science, etc.

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	ZHANG Renyao
	GUO Junmei
	WEN Ming
	GUAN Weiming

Cite this article:

ZHANG Renyao,GUO Junmei,WEN Ming, et al. Research Progress on Preparation, Properties and Application of Precious Metal Ruthenium[J]. Materials Reports, 2021, 35(21): 21243-21248.

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http://www.mater-rep.com/EN/10.11896/cldb.20030168 OR http://www.mater-rep.com/EN/Y2021/V35/I21/21243

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