Materials Reports  2019, Vol. 33 Issue (Z2): 56-60    
INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
Effect of Annealing Process on Microstructure and Electrical Properties ofPlatinum Films Grown by Magnetron Sputtering
WANG Guojun1,2, BAI Yu2, HU Shaojie1, ZHANG Min2, WANG Shubei2, WAN Fei2
1 State Key Laboratory for Mechanical Behaviour of Materials, Xi’an Jiaotong University, Xi’an 710049;
2 Xi’an Jiaotong University Suzhou Academy, Suzhou 215123