MULTI SCALE RARE EARTH CRYSTAL MATERIALS AND THEIR APPLICATIONS |
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Preparation and Polishing Properties of CuO-modified CeO2 Nanocomposite Abrasives |
SUN Jiaying1,2,†, FANG Yangfei1,2,†, ZHANG Yibo1,2, LIU Qiuwen2, LIU Kaijie2, YANG Xiangguang1,2,*
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1 School of Rare Earths, University of Science and Technology of China, Hefei 230026, China 2 Ganjiang Innovation Academy, Chinese Academy of Sciences, Ganzhou 341000, Jiangxi, China |
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Abstract The cerium oxide polishing powder with good dispersion and uniform particle size was prepared by ethylene glycol solvothermal method, and copper oxide (CuO) was introduced on the surface of cerium oxide by impregnation method. The effects of different contents of CuO on the phase structure, specific surface area, size, surface morphology and redox capacity of cerium oxide were studied, and it was found that there was no significant effect on the phase structure, morphology and macroscopic particle size distribution of cerium oxide within the loading range, but the specific surface area and redox capacity changed significantly. The polishing test showed that the introduction of CuO would significantly change the polishing ability of cerium-based polishing powder. When Cu accounts for 5% of the total molar amount of Cu and Ce atoms, the polishing performance was the best, the polishing rate was as high as 213.4 nm/min, and the roughness of the surface of the silicon wafer after polishing was only 0.239 nm (Rq) and 0.188 nm (Ra). The morphology and size of cerium oxide polishing powder synthesized by solvothermal method were fine, and the preparation method was simple and cost-effective. What’s more, the morphology and size of cerium oxide modified by CuO were not changed, and the polishing performance has been greatly improved. This work has certain universality in improving the polishing ability of cerium-based polishing powder.
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Published: 10 February 2023
Online: 2023-02-23
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Fund:Talent Project of Youth Innovation Promotion Association of Chinese Academy of Sciences (2018263), Jiangxi Province Double Thousand Plan (jxsq2020101047), the Key Research Program of the Chinese Academy of Sciences (ZDRW-CN-2021-3), and Self-deployed Projects of Ganjiang Innovation Academy, Chinese Academy of Sciences (E055C003). |
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