| INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
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| Advances in MEMS Gas Sensors Based on Metal-oxide Semiconductor Materials |
| YIN Jiaqi1,2, SHEN Wenfeng2,3,*, LYU Dawu2,3, ZHAO Jinglong2,4, HU Pengfei1, SONG Weijie2,3,*
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1 School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
2 Ningbo Institute of Material Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang, China
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 Faculty of Materials Metallurgy and Chemistry, Jiangxi University of Science and Technology, Ganzhou 341000, Jiangxi, China |
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Abstract With the rapid development of the Internet of things, there is an increasing demand for monitoring volatile organic chemicals in various fields. Metal-oxide semiconductor (MOS) gas sensors based onadvanced micro-electro-mechanical systems (MEMS) technology have significantly developed in the past few decades. The diverse design of micro hot plates, the diversification of MOS nanostructures, and the emergence of machine learning algorithms have promoted the sensing performance of MEMS sensors and their intelligent sensing systems. This paper will summarize the latest advances in the classification, preparation, and application of MEMS gas sensors and the sensor array. Finally, the deve-lopment prospect of MEMS-based gas sensors is summarized.
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Published: 10 January 2024
Online: 2024-01-16
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| Fund:Zhejiang Natural Science Foundation (LGF22F010008) and the Ningbo Natural Science Foundation (202003N4362, 202003N4332). |
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1 Kwak S, Shim Y S, Yoo Y K, et al. Electronic Materials Letters, 2018, 14(3), 305.
2 Kang J G, Park J S, Lee H J. Sensors and Actuators B-Chemical, 2017, 248, 1011.
3 Simon T, Bârsan N, Bauer M, et al. Sensors and Actuators B-Chemical, 2001, 73(1), 1.
4 Nakamura E, Matsumoto K, Mori H, et al. In:Conference Record of 2019 IEEE 69th Electronic Components and Technology Conference (ECTC). Las Vegas, 2019, pp. 417.
5 Tian F C, Jiang A Y, Yang T C, et al. IEEE Sensors Journal, 2021, 21(13), 14587.
6 Tao W H, Tsai C H. Sensors and Actuators B-Chemical, 2002, 81(2-3), 237.
7 Niu G Q, Gong H M, Zhao C H, et al. In:Conference Record of 2020 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vancouver, 2020, pp. 799.
8 Hwang I S, Kim S J, Choi J K, et al. Sensors and Actuators B-Chemical, 2010, 148(2), 595.
9 Majhi S M, Rai P, Yu Y T, et al. ACS Applied Materials & Interfaces, 2015, 7(18), 9462.
10 Lee H K, Moon S E, Choi N J, et al. Journal of the Korean Physical Society, 2012, 60(2), 225.
11 Ma J H, Ren Y, Zhou X R, et al. Advanced Functional Materials, 2018, 28(6), 67.
12 Zhang W Y, Yue H, Liu J J, et al. Transducer and Microsystem Techno-logies, 2022, 41(5), 4(in Chinese).
张伟岩, 岳宏, 刘继江, 等. 传感器与微系统, 2022, 41(5), 4.
13 Lekshmi M S, Pamula R, Kartik A, et al. In:ConferenceRecord of 2018 7th IEEE International Symposium on Next-Generation Electronics (ISNE)-Next-GenerationElectronicsfor AI and 5G Communications. Natl Taipei Univ Technol, 2018, pp. 112.
14 Yuan Z Y, Yang F, Meng F L, et al. IEEE Sensors Journal, 2021, 21(17), 18368.
15 Liu H T, Zhang L, Li K H H, et al. Micromachines, 2018, 9(11), 557.
16 Davydova M, Kromka A, Rezek B, et al. Applied Surface Science, 2010, 256(18), 5602.
17 Moon B U, Lee J M, Shim C H, et al. Sensors and Actuators B-Chemical, 2005, 108(1-2), 271.
18 He B, Yang Y, Yuen M F, et al. Nano Today, 2013, 8(3), 265.
19 Nazemi H, Joseph A, Park J, et al. Sensors, 2019, 19(6), 1285.
20 Guan D B, Yang F, Liu Q, et al. In:Conference Record of 2016 15th IEEE Sensors Conference. Orlando, 2016, pp. 1.
21 Tsai Y T, Chang S J, Tang I T, et al. IEEE Sensors Journal, 2018, 18(13), 5559.
22 Chen Y L, Li M J, Yan W J, et al. ACS Omega, 2021, 6(2), 1216.
23 Chen Y, Xu P C, Zhang P P, Zhang P P, et al. In:Conference Record of 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vancouver, 2020, pp. 1300.
24 Zhou Q, Sussman A, Chang J Y, et al. Sensors and Actuators A-Physical, 2015, 223, 67.
25 Cho I, Kang K, Yang D, et al. ACS Applied Materials & Interfaces, 2017, 9(32), 27111.
26 Xie D C, Chen D L, Peng S F, et al. IEEE Electron Device Letters, 2019, 40(7), 1178.
27 Das I, Bhattacharyya R, Saha H, et al. IEEE Sensors Journal, 2020, 20(23), 14132.
28 Liu Y Y, Xu X Y, Chen Y, et al. Sensors and Actuators B-Chemical, 2018, 262, 26.
29 Nascimento E P, Firmino H C T, Neves G A, et al. Ceramics International, 2022, 48(6), 7405.
30 Long H, Harley-Trochimczyk A, He T Y, et al. ACS Sensors, 2016, 1(4), 339.
31 Arunkumar S, Hou T F, Kim Y B, et al. Sensors and Actuators B-Chemical, 2017, 243, 990.
32 Nagarjuna Y, Hsiao Y J. Journal of The Electrochemical Society, 2021, 168(6),067521.
33 Luo N, Wang C, Zhang D, et al. Sensors and Actuators B-Chemical, DOI:10. 1016/j. snb. 2021. 130982.
34 Yang M Z, Dai C L. Sensors, 2015, 15(1), 1623.
35 Mahajan S, Jagtap S. Applied Materials Today, DOI:10. 1016/j. apmt. 2019. 100483.
36 Majhi S M, Rai P, Yu Y T. ACS Applied Materials & Interfaces, 2015, 7(18), 9462.
37 Xu L, Dai Z F, Duan G T, et al. Scientific Reports, DOI:10.1038/srep10507.
38 Santra S, Sinha A K, De Luca A, et al. Nanotechnology, DOI:10.1088/0957-4484/27/12/125502.
39 YuanK P, Zhu L Y, Yang J H, et al. Journal of Colloid and Interface Science, 2020, 568, 81.
40 Hwang I S, Kim S J, Choi J K, et al. Sensors and Actuators B-Chemical, 2010, 148(2), 595.
41 Wei A, Pan L H, Huang W. Materials Science and Engineering B-Advanced Functional Solid-State Materials. 2011, 176(18), 1409.
42 Chen Y, Xu P C, Xu T, et al. Sensors and Actuators B-Chemical, 2017, 240, 264.
43 Liu R C, Xie D C, Adedokun G, et al. IEEE Sensors Journal, 2021, 21(17), 18578.
44 Luo N, Chen Y, Zhang D, et al. ACS Applied Materials & Interfaces, 2020, 12(50), 56203.
45 Lee D H, Kang S K, Pak Y, et al. Sensors and Actuators B-Chemical, 2018, 255, 70.
46 Ando M, Biju V, Shigeri Y. Analytical Sciences, 2018, 34(3), 263.
47 Tsai Y T, Chang S J, Tang I T, et al. IEEE Sensors Journal, 2018, 18(13), 5559.
48 Skeaff J M, Dubreuil A A. Sensors and Actuators B-Chemical. 1993, 10(3), 161.
49 Chung P R, Tzeng C T, Ke M T, et al. Sensors, 2013, 13(4), 4468.
50 Xu D S, Xu P C, Wang X Q, et al. ACS Applied Materials & Interfaces, 2020, 12(7), 8091.
51 Zeng J, Hu M, Wang W D, et al. Sensors and Actuators B-Chemical, 2012, 161(1), 447.
52 Wetchakun K, Samerjai T, Tamaekong N, et al. Sensors and Actuators B-Chemical, 2011, 160(1), 580.
53 Urasinska-Wojcik B, Vincent T A, Chowdhury M F, et al. Sensors and Actuators B-Chemical, 2017, 239, 1051.
54 Zhou Q, Sussman A, Chang J Y, et al. Sensors and Actuators A-Physical, 2015, 223, 67.
55 David S P S, Veeralakshmi S, Sandhya J, et al. Sensors and Actuators B-Chemical, DOI:10. 1016/j. snb. 2020. 128410.
56 Wang T S, Liu S Y, Sun P, et al. Sensors and Actuators B-Chemical, DOI:10. 1016/j. snb. 2021. 129949.
57 Im D, Kim D, Jeong D, et al. Journal of Materials Science & Technology, 2020, 38, 56.
58 Xu Y S, Zheng L L, Yang C. ACS Applied Materials & Interfaces, 2020, 12, 20704.
59 Li Z S, Liu X H, Zhou M. Journal of Hazardous Materials, 2021, 415, 125757.
60 Zhang J, Wu J J, Wang X X. Sensors and Actuators B-Chemical, 2017, 243, 1010.
61 Lv D W, Shen W F, Chen W G, et al. Sensors & Actuators B Chemical, DOI:10. 1016/j. snb. 2020. 129085.
62 Prajesh R, Jain N, Agarwal A. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems, 2016, 22(9), 2185.
63 Santra S, Sinha A K, De Luca A, et al. Nanotechnology, DOI:10. 1088/0957-4484/27/12/125502.
64 Kang J G, Park J S, Lee H J. Sensors and Actuators B-Chemical, 2017, 248, 1011.
65 Khoang N D, Hong H S, Trung D D, et al. Sensors and Actuators B-Chemical, 2013, 181, 529.
66 Dai Z F, Xu L, Duan G T, et al. Scientific Reports, DOI:10. 1038/srep01669.
67 Basu P K, Benedict S, Kallat S, et al. Journal of Microelectromechanical Systems, 2017, 26(1), 48.
68 Lee J, Kim J, Im J P, et al. Journal of the Korean Physical Society, 2017, 70(10), 924.
69 Zhou Q, Sussman A, Chang J Y, et al. Sensors and Actuators A-Physical, 2015, 223, 67.
70 Huang Z G. Research on inkjet 3D printing of graphene composites. Ph. D. Thesis, University of Science and Technology of China, China, 2020 (in Chinese).
黄哲观. 基于喷墨3D打印的石墨烯复合材料的研究. 博士学位论文, 中国科学技术大学, 2020.
71 Lee H K, Moon S E, Choi N J, et al. Journal of the Korean Physical Society, 2012, 60(2), 225.
72 Tanneeru A, Akbulut F P, Lee B, et al. In:Conference Record of 2019 18th IEEE Sensors Conference. Canada, 2019.
73 Xu Y S, Zheng W, Liu X H. Materials Horizons, 2020, 7, 1519.
74 Strobel J, Ghimpu L, Postica V, et al. Nanotechnology, DOI:10. 1088/1361-6528/aaf0e7.
75 Yang I H, Jin J H, Min N K. Micromachines, DOI:10. 3390/mi11010024.
76 Prajapati C S, Soman R, Rudraswamy S B, et al. Journal of Microelectromechanical System, 2017, 26(2), 433.
77 Xie D C, Liu R C, Adedokun G, et al. In:Conference Record of 2021 21st International Conference on Solid-State Sensors, Actuators and Mic-rosystems (Transducers). Electr Network, 2021, pp. 160.
78 Xue F, Adedokun G, Xie D C. Journal of Microelectromechanical Systems, 2022, 31(2), 275.
79 Xie D C, Liu R C, Adedokun G, et al. In:Conference Record of 2021 34th IEEE International Conference on Micro Mechanical Systems(MEMS). Electr Network, 2021, pp. 430.
80 Tang S R, Chen W G, Jin L F, et al. Sensors and Actuators B-Chemical, DOI:10. 1016/j. snb. 2020. 127998.
81 Ma D L, Gao J M, Zhang Z X, et al. Sensors and Actuators B-Chemical, DOI:10. 1016/j. snb. 2020. 129349.
82 Khan M A H, Thomson B, Debnath R, et al. IEEE Sensors Journal, 20(11), 6020.
83 El Barbri N, Mirhisse J, Ionescu R, et al. Sensors and Actuators B-Chemical, 2009, 141(2), 538.
84 AnnanouchF E, Gràcia I, Figueras E, et al. Sensors and Actuators B-Chemical, 2015, 216, 374. |
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