电容式柔性压力传感器的性能优化原理及研究进展

doi:10.11896/cldb.21110277

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Abstract Flexible pressure sensors are an important branch of wearable electronics, which have extensive prospects for applications in human-machine interface and health monitoring. The electrical and mechanical properties of flexible pressure sensor are rapidly being improved to meet various application requirements following the development and application of advanced materials and new device preparation strategies.
Capacitive flexible pressure sensors are superiorto other forms of flexible pressure sensors because of their high sensitivity, low power consumption, and fast response. The performance of capacitive flexible pressure sensors can be optimized by changing device structure parameters, such as effective electrode area, electrode distance, effective dielectric constant, etc. The main improvement approaches are using novel nano-materials, adopting new micro-structure designs, and developing advanced composite materials. There are four basic optimization principles:(i) increasing the efficient surface area by increasing the electrode surface roughness; (ii) introducing air to obtain a low elasticity modulus of the electrode or dielectric layer; (iii) optimizing the effective dielectric constant by introducing air or fillers; (iv) producing micro-capacitors to influence the overall capacitance change of the device.
Maintaining high sensitivity over a broad pressure range remains a critical challenge in flexible capacitive pressure sensor research. Devices with ultra-high sensitivity can easily reach compression saturation under a certain pressure. The saturation limits the detection range, resulting in poor linearity. Some recent studies have focused on improving the sensitivity and detection range of flexible capacitive pressure sensors. Gradient structure design and application of hybrid mechanisms have been demonstrated to be effective methods for obtaining a wide detection range without sacrificing sensitivity. However, hysteresis, stability and array optimization are additional problems confronting the practical application of capacitive flexible pressure sensors.
This review focuses on the rapid development of capacitive flexible pressure sensors. Mechanisms of the performance optimization are reviewed, followed by examples of structure design strategies and material optimization methods. The review concludes with a critical reflection of the current status and challenges, and discusses the prospect of the capacitive flexible pressure sensor development. This review can help to improve the design and preparation of personalized capacitive flexible pressure sensors.

Key words： flexible pressure sensor capacitive microstructure design composite materials gradient structure hybrid response

Published: 25 August 2023 Online: 2023-08-14

CLC number:

TH-39

Fund:National Natural Science Foundation of China (12172344).

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	Articles by authors
	TIAN Yuyu
	HE Ren
	WU Juying
	ZHONG Weizhou
	ZHANG Kai

Cite this article:

TIAN Yuyu,HE Ren,WU Juying, et al. Capacitive Flexible Pressure Sensor: Optimization Principle and Research Progress[J]. Materials Reports, 2023, 37(16): 21110277-14.

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http://www.mater-rep.com/EN/10.11896/cldb.21110277 OR http://www.mater-rep.com/EN/Y2023/V37/I16/21110277

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