磁流变抛光关键技术及工艺研究进展

doi:10.11896/cldb.20080279

Abstract
Figure/Table
References
Related Citation (3)

Download:

Full Text ( PDF ) (5518KB)
Export: BibTeX | EndNote (RIS)

Abstract With the increasing demand for ultra smooth planar components, the surface roughness should reach nanometer level, the surface shape accuracy should reach micron level, and there should be no surface and subsurface damage. The traditional ultra precision polishing techno-logy is low efficiency, high cost, difficult to control, easy to produce surface subsurface damage, which is difficult to meet the production requirements. Magnetorheological finishing (MRF) is a kind of ultra precision machining technology which uses the rheological property of MRF slurry in magnetic field. It is a new precision manufacturing method. The polishing process can be effectively controlled, and can achieve precision polishing, which can achieve ultra precision quality requirements.
This paper analyzes and summarizes the key contents of magnetorheological fluid and magnetic pole in magnetorheological finishing. The components and common materials of MRF are described in detail, as well as three major indexes: settlement stability, magnetomechanical properties and shear yield stress. The results show that the sedimentation rate and stability of MRF are related to the composition of MRF. The sedimentation rate of MRF is different with different magnetic sensitive particles. Different additives can be used to change the sedimentation performance by changing the surface activity of magnetic sensitive particles. The only component of magnetorheological fluid is magnetic sensitive particle under the action of magnetic field, the magnetic sensitive particles gradually form a chain structure and are in the state of condensation. When the magnetization of the magnetic sensitive particles increases, the shear stress also changes, showing an obvious increase trend. At the same time, the influence of different configuration of magnetic pole on magnetic field and the influence of different arrangement of magnetic pole on magnetic field and polishing effect are summarized. The effects of different arrangement of magnetic poles on the size of magnetic field and the uniformity of polishing pad are described. Cylindrical and square cylindrical magnets are the most ideal permanent magnet shapes compared with other magnetic poles.
In this paper, the new research directions of MRF technology are summarized, including cluster MRF technology, combined MRF technology which can process curved surface, global MRF polishing technology and ultrasonic MRF composite processing technology. The working principle and process effect of these methods are introduced. Finally, the current stage of MRF is analyzed, the problems existing in the research of polishing technology are summarized, and the future development direction is prospected.

Key words： magnetorheological finishing magnetorheological fluid magnetic pole cluster magnetorheological polishing technology ultrasonic magnetorheological composite processing technology

Published: Online: 2022-04-07

CLC number:	TH11
	TH16

Fund:Xi'an Science and Technology Plan-Science and Technology Innovation Talent Service Enterprise Project(2020KJRC0031), Science and Technology Plan of Weiyang District, Xi'an Industry University Research Collaborative Innovation Plan Project(201912), Shaanxi Provincial Key Laboratory of Special Processing Open Fund(SXTZKFJJ201902),Key Research and Development Program Project of Shaanxi Science and Technology Department(2022GY-227).

	Service
	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	XIAO Qiang
	WANG Jiaqi
	JIN Longping

Cite this article:

XIAO Qiang,WANG Jiaqi,JIN Longping. Research Progress of Key Technology and Process of Magnetorheological Finishing[J]. Materials Reports, 2022, 36(7): 20080279-10.

URL:

http://www.mater-rep.com/EN/10.11896/cldb.20080279 OR http://www.mater-rep.com/EN/Y2022/V36/I7/20080279

1 Rabinow J. Aiee Transactions, 1948,67,1308.
2 Liu H,Cheng J,Wang T,et al. Nanotechnology and Precision Enginee-ring, 2019,2(3),125.
3 Paswan S K,Singh A K. Wear, 2019,426-427,68.
4 Nie M,Cao J,Li J,et al. International Journal of Mechanical Sciences, 2019,161,105018.
5 Peng X,Yang C,Hu H,et al. The International Journal of Advanced Manufacturing Technology, 2017,88(9-12),1.
6 Zhao Z Y. Basic research on super smooth magnetorheological polishing process of fused quartz element.Master's Thesis,China Academy of Engineering Physics, China,2017(in Chinese).
赵子渊. 熔石英元件超光滑磁流变抛光工艺基础研究.硕士学位论文,中国工程物理研究院,2017.
7 Alam Z,Jha S. Wear, 2017,374-375,54.
8 Chen M,Liu H,Cheng J,et al. Applied Optics, 2017,56(19),15.
9 Kafka K R P,Hoffman B,Papernov S,et al. Laser-Induced Damage in Optical Materials,2017,10447, 1044709.
10 Grove V,Singh A K. Proceedings of the Institution of Mechanical Engineers, 2019,233(1),16.
11 Yun F Z, Feng F, Wei F, et al. In:International Symposium on Advanced Optical Manufacturing and Testing Technologies.Xi'an, 2019, pp. 25.
12 Jing H, Xian H C, Jie L, et al. In:International Symposium on Advanced Optical Manufacturing and Testing Technologies.Xi'an, 2019, pp. 36.
13 Chi L, Feng S, Ye T, et al. In:International Symposium on Advanced Optical Manufacturing and Testing Technologies.Xi'an, 2019, pp. 56.
14 Kang G.Machine Tools & Hydraulics, 2008,36(3), 173.
15 Sato T, Wu Y B, Lin W M, et al. Advanced Materials Research, 2009, 76-78(7),288.
16 Liu Q. Experimental study of the lapping based on cluster magneto-rheological effect for single crystal sic wafer. Master's Thesis,Guangdong University of Technology,China,2014(in Chinese).
刘其.单晶SiC集群磁流变研磨加工工艺实验研究.硕士学位论文,广东工业大学, 2014.
17 Seok J, Kim Y J, Jang K I, et al. International Journal of Machine Tools & Manufacture, 2007, 47(14), 2077.
18 Wang J, Xiao Q. Surface Technology, 2019,48 (10),317.
19 Dai Y F,Shi F,Peng X Q,et al. Science in China Series E:Technological Sciences, 2009,52(10),2092.
20 Jia B L,Xiao Y L,Yun F Z,et al. Applied Surface Science, 2020, 3 (2), 57.
21 Shi W L, Hong X W, Qing H Z, et al. OPTIK, 2020, 49(3),32.
22 Wang D K. Study on the key technologies of belt magnetorheological finishing.Ph.D.Thesis,University of Chinese Academy of Sciences,China,2018(in Chinese).
王德康.带式磁流变抛光关键技术研究.博士学位论文,中国科学院大学,2018.
23 Tang X H, Huang W, He J G, et al. Manufacturing Technology & Machine Tool, 2018 (12), 60(in Chinese).
唐小会,黄文,何建国,等. 制造技术与机床, 2018(12),60.
24 Sha S, Hu J, Zhang H. Mechanical Engineer, 2018,7, 5.
25 Guo M, Luo H, Wang C, et al. Surface Technology, 2018, 47(7), 28.
26 Wang L F,Lu H. Journal of Magnetic Materials and Devices, 2018,49 (5), 28(in Chinese).
王利锋,路和. 磁性材料及器件, 2018,49(5),28.
27 Zhu W, Tong Y, Yu X,et al. Astronautical Systems Engineering Techno-logy, 2019,3(1), 56.
28 Yang J, Yan H, Dai J, et al. Chemical Industry and Engineering Progress, 2017,36 (1), 247.
29 Guo Q Y, Wang J, Ouyang Q. Materials for Mechanical Engineering, 2018,42 (10), 8(in Chinese).
郭秋月,王炅,欧阳青. 机械工程材料, 2018,42(10),8.
30 Zhang H S, Hu Z D, Yan H, et al. Materials Reports B:Research Papers, 2019,33 (6), 1052(in Chinese).
张寒松,胡志德,晏华,等. 材料导报:研究篇, 2019,33(6),1052.
31 Sun C L, Xu Z D, Dai J. Journal of Southeast University (Natural Science Edition), 2019,49 (2), 328(in Chinese).
孙春丽,徐赵东,戴军. 东南大学学报(自然科学版),2019,49(2),328.
32 Choi J S,Park B J,Cho M S,et al.Journal of Magnetism＆Magnetic Materials, 2006,304(1),e374.
33 Pu H T, Jiang F J. Chemical Industry and Engineering Progress, 2005 (2), 132(in Chinese).
浦鸿汀,蒋峰景. 化工进展, 2005(2),132.
34 Ashtiani M,Hashemabadi S H,Ghaffar A.Journal of Magnetism ＆ Magnetic Materials, 2014,374,716.
35 Kordonski W I, Gorodkin S R, Novikova Z A, et al. In:Proceedings of the 6th International Conference on Er Fluids:Mr Suspensions and Their Applications.Singapore, 1998, pp.535.
36 Dans K, Kankannla S V, Triantfyllidis N. Journal of the Mechanics & Physics of Solids, 2012,60(10),120.
37 Ginder J M,Elie L D,Davis L C. patent, US EP3024235, 1996.
38 Xie J X. Journal of Materials Science & Engineering,2018,36(1),117.
39 Dai B, Jiang P, Zhou G R, et al. Powder Metallurgy Technology, 2018,36(5), 355(in Chinese).
戴斌,姜平,周根荣,等. 粉末冶金技术, 2018,36(5),355.
40 Tang A J. Development of a new plate polishing technique with an instantaneous tiny-grinding wheel cluster based on magnetorheological effect.Master's Thesis,Guangdong University of Technology, China,2008(in Chinese).
汤爱军. 集群磁流变效应微磨头平面研抛加工技术研究.硕士学位论文,广东工业大学, 2008.
41 Chen G. Study on the cluster magnetorheological polishing experiment of single crystal sapphire substrate.Master's Thesis,Xi'an Technological University, China,2018(in Chinese).
陈刚. 单晶蓝宝石基片集群磁流变抛光实验研究.硕士学位论文, 西安工业大学, 2018.
42 Guo M, Yan Q, Pan J, et al. Diamond & Abrasive Engineering, 2018,38 (1), 89.
43 Yu P. Research on magnetorheological finishing of strontium titanate ceramic substrates with dynamic magnetic fields effect.Master's Thesis, Guangdong University of Technology, China,2017(in Chinese).
于鹏,钛酸锶电瓷基片动态磁场磁流变抛光研究.硕士学位论文,广东工业大学,2017.
44 Zhou Q Q,Peng K,Chen Y F, et al. Surface Technology, 2020,49(6),337(in Chinese).
周琴琴,彭可,陈永福,等. 表面技术,2020,49(6),337.
45 Yan Q S,Tang A J,Lu J B, et al. Diamond & Abrasives Engineering, 2008,5,66.
46 Liu Q.Experimental study of the lapping based on cluster magneto-rheological effect for single crystal SiC wafe.Master's Thesis,Guangdong University of Technology, China,2014(in Chinese).
刘其.单晶SiC集群磁流变研磨加工工艺实验研究.硕士学位论文, 广东工业大学,2014.
47 Pan W,Lu J,Yan Q. Lubrication Engineering, 2018,43(10),45.
48 Xiao Q,Chen G. Acta Photonica Sinica, 2018,47(1),7(in Chinese).
肖强,陈刚. 光子学报, 2018,47(1),7.
49 Li Z.Research on the key technology of combined magnetorheological finishing.Master's Thesis,Hunan University, China,2016(in Chinese).
李智.组合磁流变抛光的关键技术研究.硕士学位论文,湖南大学,2016.
50 Xiao X L, Yan Q S, Pan J S, et al. Surface Technology, 2019,48(2),268(in Chinese).
肖晓兰,阎秋生,潘继生,等. 表面技术, 2019,48(2),268.
51 Hu J F.Research on polishing zirconia ceramic with magnetorheological finishing-ultrasonic composite technology. Master's Thesis, Changchun University of Technology,China,2016(in Chinese).
胡锦飞.磁流变-超声波综合技术抛光氧化锆陶瓷的研究.硕士学位论文,长春工业大学,2016.
52 Zhang F H,Wang H J,Hang Z,et al. SPIE, 2007,6722,67221p1.
53 Esmaeilzare A, Rahimi A, Rezaei S M. Applied Surface Science, 2014,313(7),67.
54 Maas P, Mizumoto Y, Kakinuma Y, et al. International Journal of Precision Engineering & Manufacturing, 2017, 18(1),109.
55 Luo J, Dornfeld D A. Transactions on Semiconductor Manufacturing, 2003, 16(3), 469.