| INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
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| Research Progress of Dislocations in Diamond Single Crystals and Their Effects on Devices |
| HAN Saibin1,2, HU Xiufei1,2, WANG Yingnan1,2, WANG Ziang1,2, ZHANG Xiaoyu1,2, PENG Yan1,2,*, GE Lei1,2, XU Mingsheng1,2, XU Xiangang1,2,*, FENG Zhihong3,4,*
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1 Institute of Novel Semiconductors,Shandong University,Jinan 250100,China
2 State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100,China
3 National Key Laboratory of Application Specific Integrated Circuit,Shijiazhuang 050051,China
4 The 13th Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China |
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Abstract Diamond is one of well-known ultra-wide band gap semiconductor materials.It has excellent properties such as wide band gap,high thermal conductivity,high carrier mobility,high electron saturation drift velocity,and good radiation resistance.The progresses of diamond technology in recent decades has opened doors for the application for high-tech fields such as power devices,quantum information,and radiation detection.However,compared with other mature semiconductor materials such as Si with zero dislocation and SiC which TSD dislocation less than 102 cm-2,the dislocation density of diamond single crystal is in the range of 103—108 cm-2,that lead to its performance far lower than the theoretical value.Nowadays the dislocation mechanism and reducing dislocation is of acute interest.In this paper,the main types of dislocations in diamond single crystals and the induced causes of dislocations are introduced.The characterization methods of diamond dislocations,the approaches of reducing dislocation density and the influence of dislocations on the performance of different devices are discussed.Finally,the opportunities and challenges faced by diamond are summarized,and the future development of diamond is prospected.
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Published: 25 October 2024
Online: 2024-11-05
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| Fund:Key R & D Program of Shandong Province(2022CXGC010103, 2022ZLGX02), National Natural Science Foundation of China(62004118), Open Research Fund of State Key Laboratory of Pulsed Power Laser Technology (SKL2021KF08), State Key Laboratory of Crystal Mate-rials Independent Project, National Defense Science and Technology Key Laboratory Fund Project. |
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1 Cai Y, Gao F, Chen H, et al. Optics Communications, 2023, 528, 128985.
2 Donato N, Rouger N, Pernot J, et al. Journal of Physics D:Applied Physics, 2020, 53(9), 093001.
3 Sanders N, Kioupakis E. Applied Physics Letters, 2021, 119(6), 062101.
4 Xiong J, Liu L, Song H, et al. Diamond and Related Materials, 2022, 130, 109403.
5 Zhi T, Tao T, Liu B, et al. Diamond and Related Materials, 2021, 119, 108605.
6 Guo H X, Li Y Z, Yu X X, et al. Micromachines, 2022, 13(9), 1486.
7 Li Y, Zheng Z X, Zhang C, et al. Semiconductor Science and Technology, 2021, 36(10), 105001.
8 Wang Y N, Hu X F, Ge L, et al. Crystals, 2023, 13(3), 500.
9 Childress L, Hanson R. MRS Bulletin, 2013, 38(2), 134.
10 Wrachtrup J, Jelezko F. Journal of Physics Condensed Matter, 2006, 18(21), S807.
11 Wrachtrup J, Kilin S Y, Nizovtsev A P. Optics and Spectroscopy, 2001, 91(3), 429.
12 Anderlini L, Bellini M, Cindro V, et al. Sensors, 2022, 22(22), 8722.
13 Bäni L, Alexopoulos A, Artuso M, et al. Journal of Physics D:Applied Physics, 2019, 52(46), 465103.
14 Su K, Wang H, He Q, et al. IEEE Electron Device Letters, 2022, 43(3), 454.
15 Hudgins J L, Simin G S, Santi E, et al. IEEE Transactions on Power Electronics, 2003, 18(3), 907.
16 Kim S W, Takaya R, Hirano S, et al. Applied Physics Express, 2021, 14(11), 115501.
17 Deng F, Chen X, Huang L, et al. Journal of Crystal Growth, 2023, 618, 127217.
18 Li C M, Ren F T, Shao S W, et al. Journal of Synthetic Crystals, 2022, 51(5), 759(in Chinese).
李成明, 任飞桐, 邵思武, 等. 人工晶体学报, 2022, 51(5), 759.
19 Achard J, Tallaire A, Mille V, et al. Physica Status Solidi (A) Applications and Materials Science, 2014, 211(10), 2264.
20 Naamoun M, Tallaire A, Silva F, et al. Physica Status Solidi (A):Applications and Materials Science, 2012, 209(9), 1715.
21 Achard J, Silva F, Brinza O, et al. Physica Status Solidi (A):Applications and Materials Science, 2009, 206(9), 1949.
22 Tallaire A, Brinza O, Mille V, et al. Advanced Materials, 2017, 29(16), 1604823.
23 Tsubouchi N. Applied Physics Letters, 2020, 117(22), 222103,.
24 Schreck M, Ščajev P, Träger M, et al. Journal of Applied Physics, 2020, 127(12), 125102.
25 Aharonovich I, Neu E. Advanced Optical Materials, 2014, 2(10), 911.
26 Berhane A M, Choi S, Kato H, et al. Applied Physics Letters, 2015, 106(17), 171102.
27 Kawai S, Yamano H, Sonoda T, et al. Journal of Physical Chemistry C, 2019, 123(6), 3594.
28 Ichikawa K, Koizumi S, Teraji T. Journal of Applied Physics, 2022, 132(2), 025302.
29 Turner S, Idrissi H, Sartori A F, et al. Nanoscale, 2016, 8(4), 2212.
30 Ichikawa K, Shimaoka T, Kato Y, et al. Journal of Applied Physics, 2020, 128(15), 155302.
31 Fujita N, Blumenau A T, Jones R, et al. Physica Status Solidi (A):Applications and Materials Science, 2006, 203(12), 3070.
32 Fujita N, Blumenau A T, Jones R, et al. Physica Status Solidi (A):Applications and Materials Science, 2007, 204(7), 2211.
33 Umezawa H, Kato Y, Watanabe H, et al. Diamond and Related Materials, 2011, 20(4), 523.
34 Kato Y, Umezawa H, Yamaguchi H, et al. Japanese Journal of Applied Physics, 2012, 51(9), 090103.
35 Han X, Peng Y, Wang X, et al. Journal of Electronic Materials, 2022, 51(9), 4995.
36 Ichikawa K, Kodama H, Suzuki K, et al. Thin Solid Films, 2016, 600, 142.
37 Issaoui R, Tallaire A, Mrad A, et al. Physica Status Solidi (A):Applications and Materials Science, 2019, 216(21), 1900581.
38 Mu L, Su K, Hu T, et al. Diamond and Related Materials, 2022, 130, 109527.
39 Tallaire A, Mille V, Brinza O, et al. Diamond and Related Materials, 2017, 77, 146.
40 Alegre M P, Araujo D, Fiori A, et al. Applied Physics Letters, 2014, 105(17), 1715.
41 Gonzalez-Manas M, Vallejo B. Journal of Applied Crystallography, 2018, 51, 1684.
42 Ivanov O A, Muchnikov A B, Chernov V V, et al. Materials Letters, 2015, 151, 115.
43 Tsubouchi N, Diamond and Related Materials, 2017, 78, 44.
44 Willems B, Martineau P M, Fisher D, et al. Physica Status Solidi (A) Applications and Materials Science, 2006, 203(12), 3076.
45 Gaukroger M P, Martineau P M, Crowder M J, et al. Diamond and Related Materials, 2008, 17(3), 262.
46 Shikata S, Miyajima K, Akashi N. Diamond and Related Materials, 2021, 118, 108502.
47 Crisci A, Baillet F, Mermoux M, et al. Physica Status Solidi (A):Applications and Materials Science, 2011, 208(9), 2038.
48 Honbu T, Takeuchi D, Ichikawa K, et al. Diamond and Related Materials, 2021, 117, 108463.
49 Hoa L T M, Ouisse T, Chaussende D, et al. Crystal Growth & Design, 2014, 14(11), 5761.
50 Kono S, Teraji T, Kodama H, et al. Diamond and Related Materials, 2015, 59, 54.
51 Tsubouchi N, Mokuno Y, Shikata S. Diamond and Related Materials, 2016, 63, 43.
52 Xu J M. Investigation on H-terminated diamond:electrical conduction and FETs’ performance. Master’s Thesis, Xidian University, China, 2020 (in Chinese).
徐佳敏. 氢终端金刚石电导及场效应管特性研究. 硕士学位论文, 西安电子科技大学, 2020.
53 Khokhryakov A F, Palyanov Y N, Kupriyanov I N, et al. Journal of Crystal Growth, 2011, 317(1), 32.
54 Kato Y, Umezawa H, Yamaguchi H, et al. Diamond and Related Materials, 2012, 29, 37.
55 Tsubouchi N, Mokuno Y. Journal of Crystal Growth, 2016, 455, 71.
56 Chen P C, Miao W C, Ahmed T, et al. Nanoscale Research Letters, 2022, 17(1), 30.
57 Tallaire A, Barjon J, Brinza O, et al. Diamond and Related Materials, 2011, 20(7), 875.
58 Naamoun M, Tallaire A, Doppelt P, et al. Diamond and Related Materials, 2015, 58, 62.
59 Stoupin S, Antipov S, Butler J E, et al. Journal of Synchrotron Radiation, 2016, 23(5), 1118.
60 Zhao Y, Guo Y Z, Lin L Z, et al. Journal of Crystal Growth, 2018, 491, 89.
61 Kowalski G, Moore M, Gledhill G, et al. Diamond and Related Materials, 1996, 5(11), 1254.
62 Masuya S, Kasu M. Diamond and Related Materials, 2018, 90, 40.
63 Burns R C, Chumakov A I, Connell S H, et al. Journal of Physics:Condensed Matter, 2009, 21(36), 364224.
64 Pinto H, Jones R. Journal of Physics:Condensed Matter, 2009, 21(36), 364220.
65 Zhao Y, Guo Y Z, Lin L Z, et al. Crystal Research and Technology, 2018, 53(7), 1800055.
66 Surovtsev N V, Kupriyanov I N. Crystals, 2017, 7(8), 239.
67 Kato Y, Umezawa H, Shikata S, et al. Diamond and Related Materials, 2012, 23, 109.
68 Araujo D, Bustarret E, Tajani A, et al. Physica Status Solidi (A):Applications and Materials Science, 2010, 207(9), 2023.
69 Tatsumi N, Tamasaku K, Ito T, et al. Journal of Crystal Growth, 2017, 458, 27.
70 Wang W H, Wang Y, Shu G Y, et al. New Carbon Materials, 2021, 36(6), 1034.
71 Wang R Z, Lin F, Niu G, et al. Materials, 2022, 15(2), 444.
72 Shikata S, Matsuyama Y, Japanese Journal of Applied Physics, 2019, 58(4), 045503.
73 Suzuki K, Iwai M, Uematsu T, et al. Key Engineering Materials, 2003, 238-239, 235.
74 Yamada H, Chayahara A, Mokuno Y, et al. Diamond and Related Materials, 2011, 20(4), 616.
75 Yamamura K, Emori K, Sun R, et al. Cirp Annals-Manufacturing Technology, 2018, 67(1), 353.
76 Brecher C, Emonts M, Hermani J P, et al. Physics Procedia, 2014, 56, 1107.
77 Heidrich S, Willenborg E, Weingarten C, et al. Materialwissenschaft und Werkstofftechnik, 2015, 46(7), 668.
78 Liu N, Sugimoto K, Yoshitaka N, et al. Ceramics International, 2023, 49(11), 19109.
79 Yuan Z W, Jin Z J, Dong B X, et al. Advanced Materials Research, 2008, 53, 111.
80 Martineau P M, Gaukroger M P, Guy K B, et al. Journal of Physics:Condensed Matter, 2009, 21(36), 364205.
81 Mokuno Y, Kato Y, Tsubouchi N, et al. Applied Physics Letters, 2014, 104(25), 252109.
82 Kubota A, Nagae S, Motoyama S. Diamond and Related Materials, 2020, 101, 107644.
83 Liu N, Yamada H, Yoshitaka N, et al. Diamond and Related Materials, 2021, 119, 108555.
84 Silva F, Achard J, Brinza O, et al. Diamond and Related Materials, 2009, 18(5), 683.
85 Hu W X, Chen K, Tao T, et al. Thin Solid Films, 2022, 763, 139571.
86 Tallaire A, Achard J, Silva F, et al. Physica Status Solidi (A):Applied Applications and Materials Science, 2004, 201(11), 2419.
87 Kamikawa T, Kobayashi T, Aoki Y, et al. Crystal Growth & Design, 2023, 23(7), 4855.
88 Suwannaharn N, Sanorpim S, Yordsri V, et al. Journal of Crystal Growth, 2022, 593.
89 Wang K, Kirste R, Mita S, et al. Applied Physics Letters, 2022, 120(3), 032104.
90 Ando Y, Kamano T, Suzuki K, et al. Japanese Journal of Applied Physics, 2012, 51(9), 090101.
91 Yamamoto H, Naoi Y, Fujii Y, et al. International Journal of Modern Physics B, 2002, 16(6-7), 841.
92 Washiyama S, Mita S, Suzuki K, et al. Applied Physics Express, 2011, 4(9), 095502.
93 Li F N, Zhang J W, Wang X L, et al. Crystals, 2017, 7(4), 114.
94 Chiu K A, Wu P H, Wang W L, et al. Surface and Coatings Technology, 2022, 437, 128348.
95 Ichikawa K, Kurone K, Kodama H, et al. Diamond and Related Materials, 2019, 94, 92.
96 Mehmel L, Issaoui R, Brinza O, et al. Applied Physics Letters, 2021, 118(6), 061901.
97 Patel J R, Chaudhuri A R. Physical Review, 1966, 143(2), 601.
98 Yonenaga I, Sumino K. Journal of Applied Physics, 1989, 65(1), 85.
99 Ohmagari S, Yamada H, Tsubouchi N, et al. Applied Physics Letters, 2018, 113(3), 032108.
100 Chang X H, Yan X L, Fan S W, et al. IEEE Transactions on Electron Devices, 2021, 68(12), 6228.
101 Bauer T, Schreck M, Stritzker B. Diamond and Related Materials, 2006, 15(4-8), 472.
102 Ogura M, Kato H, Makino T, et al. Journal of Crystal Growth, 2011, 317(1), 60.
103 Kim S W, Takaya R, Hirano S, et al. Applied Physics Express, 2021, 14(11), 115501.
104 Fischer A M, Bhattacharya A, Hardy A, et al. Diamond and Related Materials, 2023, 140, 110507.
105 Davies N, Khan R, Martineau P, et al. Journal of Physics:Conference Series, 2011, 281(1), 012026.
106 Boussadi A, Tallaire A, Kasu M, et al. Diamond and Related Materials, 2018, 83, 162.
107 Wang R Z, Lin F, Wei Q, et al. Materials, 2022, 15(2), 624.
108 Li D S, Wang Q L, Lv X Y, et al. Journal of Alloys and Compounds, 2023, 960, 170890.
109 Ohmagari S, Teraji T, Koide Y. Journal of Applied Physics, 2011, 110(5), 056105.
110 Akashi N, Fujimaki N, Shikata S. Diamond and Related Materials, 2020, 109, 108024.
111 Traore A, Muret P, Fiori A, et al. Applied Physics Letters, 2014, 104(5), 052105.
112 Umezawa H, Mokuno Y, Yamada H, et al. Diamond and Related Materials, 2010, 19(2-3), 208.
113 Teraji T, Liao M Y, Koide Y. Journal of Applied Physics, 2012, 111(10), 104503.
114 Umezawa H, Saito T, Tokuda N, et al. Applied Physics Letters, 2007, 90(7), 073506.
115 Hanada T, Ohmagari S, Kaneko J H, et al. Applied Physics Letters, 2020, 117(26), 262107.
116 Fujiwara H, Naruoka H, Konishi M, et al. Applied Physics Letters, 2012, 100(24), 242102.
117 Fujiwara H, Naruoka H, Konishi M, et al. Applied Physics Letters, 2012, 101(4), 042104.
118 Mikata N, Takeuchi M, Ohtani N, et al. Diamond and Related Materials, 2022, 127, 109188.
119 Kasu M, Kubovic M, Aleksov A, et al. Diamond and Related Materials, 2004, 13(2), 226.
120 Mu L X, Su K, Hu T T, et al. Diamond and Related Materials, 2022, 130, 109527.
121 Tarun A, Lee S J, Yap C M, et al. Diamond and Related Materials, 2016, 63, 169.
122 Lohstroh A, Sellin P J, Wang S G, et al. Applied Physics Letters, 2007, 90(10), 102111.
123 Secroun A, Brinza O, Tardieu A, et al. Physica Status Solidi (A):Applications and Materials Science, 2007, 204(12), 4298.
124 Su K, He Q, Zhang J, et al. Journal of Physics D:Applied Physics, 2021, 54(14), 145105. |
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2024, Vol. 38 
