钛合金表面硅铜共掺杂类金刚石复合薄膜微观结构与摩擦学性能研究

doi:10.11896/cldb.24080234

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Abstract Guided by the urgent need of wear resistance, high strength and fatigue resistance of automotive titanium alloy parts in the whole life cycle, based on surface engineering and composite multi-component structure design, the Si/Cu-DLC composite films with different acetylene gas flow rate were deposited on automotive titanium alloy by microwave ECR enhanced magnetron sputtering technology. The structure, residual stress, hardness, adhesive force and wear properties of these films were studied by X-ray diffraction, Raman spectrometer, profilometry technique, nano-indenter and wear test. The results show that the Si and Cu are successfully doped into DLC films, the residual stress of the Si/Cu-DLC composite films decreases with the increase of acetylene gas flow rate. The sp³ hybrid bond content first increases and then decreases with the increases of acetylene flow rate. The Si/Cu-DLC composite films with acetylene gas flow rate of 30 sccm has a high sp³ hybrid bond content and hardness, the best adhesion strength and wear resistance, excellent toughness and crack deformation resistance due to the high H/E and H3/E2 ratios, effectively improving the service life of urgent titanium alloy. The findings can provide the reference and theoretical basis for the material design and selection of wear resistant coatings for automotive titanium alloy.

Key words： Si/Cu-DLC composite films structure residual stress mechanical property wear resistance

Published: 10 October 2025 Online: 2025-09-24

CLC number:

TG430.15

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	Articles by authors
	XU Zhaoying
	SU Yongyao
	ZHANG Tengfei
	WANG Jinbiao
	WU Jie

Cite this article:

XU Zhaoying,SU Yongyao,ZHANG Tengfei, et al. Study on Microstructure and Tribological Properties of Silicon-Copper Codoped Diamond-like Composite Films on Titanium Alloy[J]. Materials Reports, 2025, 39(19): 24080234-6.

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https://www.mater-rep.com/EN/10.11896/cldb.24080234 OR https://www.mater-rep.com/EN/Y2025/V39/I19/24080234

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