| MATERIALS FOR SOLAR CELLS |
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| The Design and Preparation Technique of Anti-static Layer Made of Ultra-thin ITO Film and Coated on Glass Cover of Space Solar Cell |
| JIN He1, ZHOU Lingping1,2, ZHU Jiajun1,2, FU Licai1, YANG Wulin1, LI Deyi1
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1 College of Materials Science and Engineering, Hunan University, Changsha 410082;
2 Key Laboratory of Spray Deposition Technology of Hunan Province, Changsha 410082 |
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Abstract ITO/MgF2 composite film has good surface conductivity and high transmittance, which can be applied to the anti-static & anti-reflection composite layer of space solar cell’s glass cover. This work mainly focused on the outerlayer (i.e. ultra-thin ITO film) of the ITO/MgF2 composite film. We conducted a simulation upon the effect of ITO film’s thickness on the composite film’s optical properties via TFCalc software, premised on which an MgF2 thin film and an ITO thin film were sequentially deposited on a glass substrate by electron beam evaporation. The influences of processing parameters (deposition rate, deposition temperature and working pressure) and thickness of ITO thin film on the optical, electrical properties and microstructure of ITO/MgF2 composite thin film were studied. By applying 0.05 nm/s deposition rate, 400 ℃ deposition temperature, 2.3×10-2 Pa working pressure and 10 nm ITO thickness, we obtained a substantial continuity and a satisfactory sheet resistance (1.94 kΩ/□) of the ITO layer with which the ITO/MgF2 composite film’s average transmittance in the visible range (400—800 nm) reached 89.00%.
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Published: 10 September 2017
Online: 2018-05-07
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