Materials Reports  2018, Vol. 32 Issue (10): 1683-1687     https://doi.org/10.11896/j.issn.1005-023X.2018.10.022
RESEARCH PAPER |
An Innovative Preparation Methodology of Non-spherical Nanosize Silica Particle
KONG Hui1,2, LIU Weili1, SONG Zhitang1
1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050;
2 School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049