金属掺杂MoS<sub>2</sub>基复合薄膜的微观结构与真空摩擦学性能研究

doi:10.11896/cldb.25040052

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Abstract MoS₂, MoS₂-Ti, MoS₂-Ag and MoS₂-(Ti+Ag) films were deposited on Si wafers and 9Cr18 steel using unbalanced magnetron sputtering technology. A comparative analysis of these four films was subsequently conducted. The films exhibit granular surface morphology and columnar structure in cross-section. Doping with Ti and Ag significantly enhances films compactness, while Ti doping results in peak broadening, indicating refined grain size. The mechanical property tests demonstrate that both Ti doping and (Ti+Ag) co-doping significantly improve film hardness and adhesion. Compared to pure MoS₂ films, hardness increases by factors of 5.9 and 5.1, respectively, and adhesion increases by 3.5 times and 3.2 times. Vacuum tribological tests reveal that Ti-doped and (Ti+Ag)-co-doped films significantly outperform pure MoS₂ films (wear rate:1.63×10^-15 m³/(N·m)) in wear resistance. The MoS₂-(Ti+Ag) film exhibits a wear rate of 0.9×10^-17m³/(N·m), representing a two-order-of-magnitude reduction and demonstrating superior tribological performance. This study provides a theoretical basis and experimental data for improving the vacuum tribological properties of metal doped MoS₂ composite films.

Key words： MoS₂ film metal doping hardness vacuum tribological property

Published: 10 August 2025 Online: 2025-08-13

CLC number:

TH117

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	Articles by authors
	ZHENG Yugang
	GOU Shining
	FENG Xingguo
	WANG Keliang
	ZHAO Meng
	ZHANG Kaifeng
	ZHOU Hui
	LI Lin

Cite this article:

ZHENG Yugang,GOU Shining,FENG Xingguo, et al. Microstructure and Vacuum Tribological Properties of Metal Doped MoS₂ Composite Films[J]. Materials Reports, 2025, 39(15): 25040052-7.

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https://www.mater-rep.com/EN/10.11896/cldb.25040052 OR https://www.mater-rep.com/EN/Y2025/V39/I15/25040052

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