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Advances in MEMS Gas Sensors Based on Metal-oxide Semiconductor Materials
YIN Jiaqi, SHEN Wenfeng, LYU Dawu, ZHAO Jinglong, HU Pengfei, SONG Weijie
Materials Reports . 2024, (
1
): 22070075 -14 . DOI: 10.11896/cldb.22070075
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