METALS AND METAL MATRIX COMPOSITES |
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Research Progress on the Preparation of Infrared Anti-reflection Micro-Nano Structure by Etching Process |
LI Xuewu1, WANG Hongxing1,2, GUO Weiling2, XING Zhiguo2, HUANG Yanfei2,*, WANG Haidou3,*
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1 School of Mechanical Engineering, Xi'an University of Science and Technology, Xi'an 710054, China 2 National Key Laboratory for Remanufacturing, Army Academy of Armored Forces of PLA, Beijing 100072, China 3 National Engineering Research Center for Remanufacturing, Army Academy of Armored Forces of PLA, Beijing 100072, China |
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Abstract The ‘moth-eye effect' refers to the phenomenon that the refractive index of the light wave changes continuously due to the micro-nano structures of the moth-eye surface in the depth direction, so that most of the light is absorbed and only rarely reflected. Inspired by the ‘moth-eye effect', the preparation of micro-nano structured surfaces on materials has attracted wide attention owing to its unique anti-reflection properties. It has broad application prospects in solar cells, photodetectors, photodiodes, and military stealth. In this paper, the antireflection principles of different micro-nano structures are sorted, and the preparation methods and applications of different etching of infrared antireflective structures are reviewed. The characteristics of infrared antireflection structure preparation methods, such as chemical etching, reactive ion etching, and ultrafast laser etching, and the influence of the antireflection performance are summarized. Applications of infrared antireflection structures in infrared detection, infrared thermal imaging and stealth are described. The research direction and future prospects of the preparation methods for anti-reflection structures are discussed.
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Published: 25 March 2024
Online: 2024-04-07
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Fund:National Natural Science Foundation of China (52275227,52275211,52130509) and Science and Technology New Star Project of Shaanxi Innovation Capability Support Program(2021KJXX-38). |
Corresponding Authors:
*huangyanfei123@126.com;wanghaidou@aliyun.com
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