日盲紫外硅/金刚石异质结光电二极管的结构设计和仿真

doi:10.11896/cldb.22030226

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Abstract Diamond is a semiconductor material with its low cost, nontoxic, and high chemical stability, which is also one of the ideal materials for ultra-violet photodiode. Its application in ultraviolet photodiode made it possible to replace the currently widely used ultraviolet photodiodes containing rare noble metal elements in the future. The device structure of solar blind ultraviolet silicon/diamond heterojunction photodiode was constructed by using Atlas module in Silvaco software. The effects of thickness and doping concentration on dark current, spectral response and transient response of photodiode were studied, and the dark current, reverse breakdown voltage and doping concentration of photodiode after preliminary optimization were obtained. The simulation results show that the silicon/diamond pin heterojunction photodiode has higher responsivity in the spectral range of 10—220 nm than that of the silicon/diamond pn heterojunction photodiode. When the peak wavelength is 220 nm, the maximum spectral response current of the photodiode is 1.7×10^-11 A. The dark current of the pin heterojunction photodiode is approximately 5.6×10^-15 A, which is smaller than that of the pn heterojunction photodiode. The work will lay a good foundation for the further structure optimization and the fabrication of high-performance silicon/diamond heterojunction photodiode.

Key words： silicon/diamond heterojunction spectral response Silvaco-TCAD

Published: 25 October 2023 Online: 2023-10-19

CLC number:

TN302

Fund:National Natural Science Foundation of China (61264004),Industry and Education Combination Innovation Platform of Intelligent Manufacturing and Graduate Joint Training Base at Guizhou University (2020-520000-83-01-324061),Foundation for Sci-tech Activities for the Overseas Chinese Returnees in Guizhou Province ([2018]09),High-level Innovative Talent Training Project in Guizhou Province ([2015]4015),and Sci-tech Project from Guiyang City ([2021]1-3).

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	Articles by authors
	DENG Kangning
	XIAO Qingquan
	CHEN Hao
	WANG Aoshuang
	WANG Jiangxiang

Cite this article:

DENG Kangning,XIAO Qingquan,CHEN Hao, et al. Structure Design and Simulation of Solar Blind Ultraviolet Silicon/Diamond Heterojunction Photodiode[J]. Materials Reports, 2023, 37(20): 22030226-6.

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http://www.mater-rep.com/EN/10.11896/cldb.22030226 OR http://www.mater-rep.com/EN/Y2023/V37/I20/22030226

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