不同B/C摩尔比碳化硼薄膜的光学性能

doi:10.11896/cldb.20040077

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Abstract Multilayer mirrors are essential optical components in X-ray and extreme ultraviolet regions. As a common reflective coating material, the composition of boron carbide thin film and the accuracy of the optical constants calculation have great effect on the reflection performance of the mirror. Boron carbide thin films were grown with DC magnetron sputtering and characterized by XPS, XRR, AFM, synchrotron radiation, et al. The reflectance curves of the substrate and the film were fitted with the improved curve fitting function. Results show that amorphous boron carbide thin films consist of boron carbide and oxy-boron carbide, the chemical states of the elements are the same. Sample with B/C molar ratio of 4.23 shows the best reflection performance in the wavelength range from 5 nm to 45 nm, and it has the largest value of the electronic density difference between the substrate and the film. The change of the reflection property is basically the same as that of the electronic density diffe-rence of the samples. Compared with the original fitting function, the improved fitting function improves the accuracy of the optical constants calculation.

Key words： boron carbide magnetron sputtering reflection electron density optical constant

Published: 28 January 2021

CLC number:

O484

Fund:The National Key Research and Development Program of China (2017YFB0310600).

About author:: Qile Li, graduate student in the master of Shanghai Institute of Ceramics, Chinese Academy of Sciences, majoring in the optical properties of magnetron sputtered boron carbide thin films in X-ray and extreme ultraviolet regions.
Yong Yang, researcher of the State Key Laboratory of High Performance Ceramics and Superfine Microstructure, doctoral supervisor of Shanghai Institute of Ceramics, Chinese Academy of Sciences. His main research directions are: (1) nano materials and nano sensors for energy and environment, design and preparation of precious metal and semiconductor nano mate-rials and structures, research on optical and catalytic properties of nano materials; (2) optical thin films and their applications; (3) surface modification of ceramic and inorganic mate-rials. Presided over the development of the first set of SiC optical components for space lidar in China. The ceramic surface modification and optical coating technology developed has been successfully applied to Beidou navigation and practice 17 satellite. Up to now, he has published more than 100 papers included in SCI in academic journals at home and abroad, such as Advanced Science, npj Computational Materials, Nano Energy, etc. As the project leader, he has undertaken major projects such as NSFC, National Key R & D Plan, Beidou Navigation Laser Communication Optics, and Shanghai Pujiang Talent Plan, presided over and participated in a number of national defense and military scientific research projects.
Zhengren Huang, researcher of the State Key Laboratory of High Performance Ceramics and Superfine Microstructure, doctoral supervisor of Shanghai Institute of Ceramics, Chinese Academy of Sciences. He major in the composition, structure, stress design and preparation of advanced structural ceramic materials. A series of important research results and innovative preparation technology have been obtained in the aspects of strengthening and toughening of carbide, oxide compo-site ceramics and ceramic matrix composites, wet forming of non oxide cera-mics, preparation and performance research of non oxide nano powder and metal ceramic nano composite powder. Advanced forming and preparation technology research of ceramic components, surface of advanced ceramic
materials significant breakthroughs have been made in the research of modification technology, connection technology of ceramic materials, non-destructive testing technology of ceramic materials and components, and ultra-high temperature ceramic materials. He has presided over and completed nearly 30 important scientific research projects such as NSFC, 863, 973 Projects, va-rious national key projects, Knowledge Innovation Direction Projects of Chinese Academy of Sciences, Shanghai Basic Research Projects, and Shanghai Science and Technology Research Projects.

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	LI Qile
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	WEI Yuquan
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	HUO Tonglin
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Cite this article:

LI Qile,YANG Yong,WEI Yuquan, et al. Optical Properties of Boron Carbide Thin Films with Different B/C Molar Ratio[J]. Materials Reports, 2021, 35(2): 2006-2011.

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http://www.mater-rep.com/EN/10.11896/cldb.20040077 OR http://www.mater-rep.com/EN/Y2021/V35/I2/2006

1 Wang Z S, Cao J L, Michette A G. Optics Communications, 2000, 177(1-6),25.
2 Kim C K, Park Y S, Han S J, et al. Journal of Chemical Engineering, 2015, 32(10), 2124.
3 Spiller E. Applied Physics Letters, 1972, 20(9), 365.
4 Bute A, Jena S, Bhattacharya D, et al. Materials Research Bulletin, 2019, 109, 175.
5 Yanagihara M, Cao J, Yamamoto M, et al. Review of Scientific Instruments, 1989, 60(7), 2014.
6 Yao Y W, Kunieda H, Matsumoto H, et al. Applied Optics, 2013, 52(27), 6824.
7 Carrard M, Emin D, Zuppiroli L. Physical Review B, 1995, 51(17), 11270.
8 Bouchacourt M, Thevenot F. Journal of the Less-Common Metals, 1981, 82(1-2), 227.
9 Aquila A, Sobierajski R, Ozkan C, et al. Applied Physics Letters, 2015, 106(24), 241905-1.
10 Pradhan P C, Majhi A, Nayak M. Journal of Applied Physics, 2018, 123(9), 095302-1.
11 Pivovaroff M J, Bionta R M, Mccarville T J, et al. In: Conference Record of the Conference on Advances in X-Ray/EUV Optics and Components II. San Diego, 2007, 6705, 67050O-1.
12 Rao P N, Gupta R K, Saravanan K, et al. Surface & Coatings Technology, 2018, 334, 536.
13 Monaco G, Garoli D, Frison R, et al. In: Conference Record of the Conference on Advances in X-Ray/EUV Optics, Components and Applications. San Diego, 2006, 6317, 631712-1.
14 Zemsky D, Shneck R, Dagdigian P J, et al. Journal of Applied Physics, 2007, 102(10), 104309-1.
15 Schmidt S, Hoglund C, Jensen J, et al. Journal of Materials Science, 2016, 51(23), 10418.
16 Cao J L, Yanagihara M, Yamamoto M, et al. Applied Optics, 1994, 33(10), 2013.
17 Yang Y, Zhang J W, Fu C L, et al. Materials & Design, 2016, 107, 1.
18 Comisso A, Nardello M, Giglia A, et al. Optical Engineering, 2016, 55(9), 095102-1.
19 Jacobsohn L G, Schulze R K, Da C M, et al. Surface Science, 2004, 572(2-3), 418.
20 Zhou M J, Wong S F, Ong C W, et al. Thin Solid Films, 2007, 516(2-4), 336.
21 Shirai K, Emura S, Gonda S I, et al. Journal of Applied Physics, 1995, 78(5), 3392.
22 Bao R Q, Chrisey D B. Thin Solid Films, 2010, 519(1), 164.
23 Evans B L, Aldabbagh J, Kent B J. Journal of Modern Optics, 1989, 36(4), 471.