Materials Reports  2020, Vol. 34 Issue (Z2): 173-176 |
| INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
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| Influence of Directional Solidification Induced by Electron Beam on Segregation of Fe in Silicon |
| JIANG Jianbo1,2, HUANG Yiping3, LI Shaolin3, LIU Hailang3, PENG Zhiguo3, TAN Yi4
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1 State Key Laboratory of Metal Materials for Marine Equipment and Applications, Anshan 114000, China
2 Ansteel Beijing Research Institute, Beijing 102209, China
3 Institute of Electrical and Mechanical Engineering, Guilin University of Electronic Technology, Guilin 541004, China
4 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China |
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Abstract Directional solidification is a main technology to remove metal impurities in silicon. These impurities can be enriched to the final solidification region by segregation effect. The effect of segregation depends on the driving force of impurities transport at the front of solid-liquid interface. However, during traditional directional solidification technology, the driving force provided by thermal gradient is limited, so that the deep removal of impurities can only be achieved by reducing the solidification rate or increasing the solidification times. In this study, the directional solidification of silicon is achieved by the induction of electron beam, the purification effect of Fe and its influence mechanism are investigated. The results show that Fe content is reduced to less than 0.2×10-6 by the induction of electron beam. The diffusion layer thickness of Fe is 4.13×10-4 m, which is one order of magnitude smaller than that during traditional directional solidification. The large temperature gradient formed by electron beam enhances the convection of melt, and the directional migration of electrons interacts with impurity elements, which increase the driving force of impurity transport at the front of solid-liquid interface.
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Published: 08 January 2021
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| Fund:The work was supported by the Foundation Project of the State Key Laboratory of Metal Material for Marine Equipment and Application (SKLMEA-K201801). |
| About author:: Jianbo Jiang received his Ph.D. degree in materials processing from Dalian University of Technology in 2011. And he is currently engaged in the development of welding technology and clad plate in the Ansteel Beijing Research Institute and the State Key Laboratory of Metal Materials for Marine Equipment and Applications.Yi Tan received his Ph.D. degree from Tokyo Institute of Technology. He is currently a professor at the Dalian University of Technology and participates in research and development of high-temperature alloys, polysilicon, and related equipment. |
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1 Kvande R, Mjos O, Ryningen B.Materials Science and Engineering A, 2005, 413, 545.
2 Martorano M A, Neto J B F, Oliveira T S, et al.Materials Science and Engineering B, 2011, 176, 217.
3 魏奎先, 郑达敏, 马文会, 等.真空科学与技术学报, 2014, 34(12),1358.
4 Shi S, Tan Y, Jiang D C, et al.Separation and Purification Technology, 2015, 152, 32.
5 Tan Y, Shi S, Guo X L, et al.Vacuum, 2013, 89, 12.
6 Tan Y, Wen S T, Shi S, et al.Vacuum, 2013, 95, 18.
7 Hofstertter J, Lelievre J F, del Canizo C, et al.Materials Science and Engineering B, 2009, 159-160, 299.
8 刘秋娣,林安中,林喜斌.稀有金属,2002, 26 (6), 416.
9 Brown R A, Kim D H.Journal of Crystal Growth, 1991, 109, 50.
10 Burton J A, Prim R C, Slichter W P.Journal of Chemical Physics, 1953, 21, 1987.
11 Yuge N,Sakaguchi Y,Terashima H, et al.Journal of the Japan Institute of Metals, 1997, 61(10), 1094.
12 Wen S T, Tan Y, Yuan T, et al.Vacuum, 2017, 145, 251.
13 Kvande R, Geerligs L J, Coletti G, et al.Journal of Applied Physics, 2008, 104(6), 064905.
14 Qiu S, Wen S T, Fang M, et al.Vacuum, 2016, 125, 40.
15 Gan C H, Fang M, Zhang L, et al.Transactions of Nonferrous Metals So-ciety of China, 2016, 26(3), 859.
16 傅恒志.先进材料定向凝固, 科学出版社, 2008.
17 Safarian J, Tangstad M.High Temperature Materials and Processes, 2012, 31(1), 73.
18 Safarian J, Tangstad M.Metallurgical and Materials Transactions B, 2012, 43(6), 1427.
19 温书涛. 电子束熔炼提纯多晶硅中热量传输和能量利用的研究.博士学位论文, 大连理工大学, 2013. |
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