用于功能陶瓷材料超精密平面加工的固结磨具的研究进展

doi:10.11896/cldb.19010017

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Abstract unctional ceramics are inorganic non-metallic materials that can achieve certain functions.Functional ceramic parts and products with plane as an important working face are widely used in the fields of medical treatment, people's livelihood, national defense, military industry, etc.In order to better meet the functional requirements of the product, the processing quality of the plane needs to reach the sub-micron level of shape accuracy, nanometer level of surface roughness, or even higher level. Therefore, ultra-precision machining is urgently needed for functional ceramic plane.Abrasive processing is an important way of ultra-precision machining, including consolidated abrasive and free abrasive processing, which complement each other.Whether the fixed abrasive processing can meet the ultra-precision requirements of the processed workpiece, the abrasive tool is very important.The grinding wheel used in grinding, the lapping pad and the polishing pad used in fixed abrasive lapping and polishing are all fixed abrasive tools.
The stable physical and chemical properties of functional ceramics determine that the processing accuracy of functional ceramics can be maintained for a long time after being processed, which also determines the processing of functional ceramics is different from metal materials, organic materials and engineering ceramics. The fixed abrasive tools used in ultra-precision plane processing of functional ceramics are also different from those used in ordinary processing, so it is urgent to study them pertinently.The factors affecting whether the fixed abrasive tools can meet the processing requirements mainly include: reasonable selection or modification of abrasives and binders as main raw materials of consolidation abrasives in abrasive preparation; the passivation of abrasives and the blockage of abrasive debris on the surface of fixed abrasive tools may occur in the use; whether optimizing macro-topography of abrasive tool surface or not.
In recent years, researchers at home and abroad choose abrasives based on different removal mechanisms of functional ceramics, select or modify binders for different ultra-precision planar fixed abrasive processing, make the abrasive tools maintain high efficiency and high accuracy for a long time by means of in-process dressing and surface structuring. As a result, the fixed abrasive tools prepared or selected have been successfully applied in the planar processing of the functional ceramics materials, such as silicon, germanium, sapphire, silicon carbide, glass-ceramics, lithium triborate, and so on. The processing can achieve ultra-precision processing level, and meet the functional requirements of related products in different fields.
In this paper, the research progress of abrasives for ultra-precision surface machining of functional ceramics is reviewed.The selection of abrasive materials, application of fixed abrasive tools,in-process dressing of abrasives and surface structure are introduced respectively.The problems faced by the research are analyzed and the future are prospected, in order to provide a reference for the industry and relevant researchers to fixed abrasive tools for ultra-precision machining of functional ceramic plane.

Key words： fixed abrasive tools ultra-precision planar machining functional ceramics material material selection structured surface self-conditioning

Published: 23 July 2019

CLC number:	TM28
	TQ174
	TG580

Fund:This work was financially supported by the National Natural Science Foundation of China (51575492, 51605440), China Postdoctoral Science Foundation (2017M621966), Zhejiang Province Commonweal Technology Research Project (LGG19E050021) and Zhejiang Natural Science Foundation (LR17E050002).

About author:: Jie Wang received her M.S. degree in engineering from Zhejiang University in March 2005. She is currently pursuing her Ph.D. at the Ultra-precision Machining Center (UPMC), Zhejiang University of Technology under the supervision of Prof. Julong Yuan. Her research has focused on ultra-precision planar machining of functional ceramics.
Ping Zhao, associate professor of Zhejiang University of Technology (ZJUT). Graduated from Department of Mechanics of Zhejiang University, and received the Bachelor's degree in 1987. She has been engaged in research and teaching work about precision and ultra-precision machining technology for many years. She hosted or participated in 16 research projects such as the National Fund, published over 30 academic papers, and won 5 provincial and ministerial science and technology awards. Her research fields include ultra-precision technology and equipment.
Julong Yuan is the professor of Zhejiang University of Technology, enjoys special subsidies from the government of the state council, appraised as a young and middle-aged expert with outstanding contributions in Zhejiang Province, named Qian Jiang's specialist. He received his Ph.D. degree in Harbin Institute of Technology and was postdoctoral students from Zhejiang University and Saitama University in Japan. He was a professor of Hunan University, director of national research center for high efficiency grinding engineering technology, executive deputy director of key laboratory of ministry of education of special equipment and advanced processing technology. Currently, he is the director of ultra-precision machining research center of Zhejiang University of Technology, vice-director of China Abrasive Technology Committee, vice-director of China Precision Machining and Nanotechnology Committee, member of International Abrasive Technology Committee and member of Japan Precision Industry Society.He presided over the completion of more than 30 key projects such as the key projects of the National Science and Technology Support Plan, the key projects of the National Natural Science Foundation and the projects of the National Natural Science Foundation.He has published five books, more than 300 papers, and more than 30 authorized national invention patents.He won one second prize for national science and technology progress and six first prizes for provincial and ministerial science and technology. His research fields include high-efficiency ultra-precision grinding, lapping and polishing technology and equipment.

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	WANG Jie
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Cite this article:

WANG Jie,ZHAO Ping,LYU Binghai, et al. Research Progress of the Fixed Abrasive Tools for Ultra-precision Planar Machining of Functional Ceramics[J]. Materials Reports, 2019, 33(17): 2873-2881.

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http://www.mater-rep.com/EN/10.11896/cldb.19010017 OR http://www.mater-rep.com/EN/Y2019/V33/I17/2873

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