Materials Reports  2019, Vol. 33 Issue (z1): 112-115 |
| INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
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| Rod-like Grain Growth in Al-doped ZnO Thin Films Deposited by RF Magnetron Sputtering |
| ZHAO Xiaokun1,2, LI Boyan1,2, ZHANG Zengguang1,2
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1 NICE Solar Energy Ltd, Beijing 102211
2 Beijing Engineering Research Center of Nano-structured Thin Film Solar Cell, Beijing 102211 |
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Abstract Al-doped ZnO (AZO) has been considered to be one of the most potential transparent conductive oxide (TCO) films due to its high conductivity, light transmittance, abundant and low cost feature. The 30 cm×30 cm AZO films were deposited by RF magnetron sputtering in this work. The influence of working pressure on the phase structure, microstructure, electrical properties as well as optical properties of AZO films were studied, and the modification of the microstructure and properties were achieved. The film deposition rate was lowered by increasing the working pressure. The c-axis orientation preferred grain growth was weakened by increasing the working pressure. The grain size grown up by increasing the working pressure and rod-like grain growth appeared with a length of >100 nm. The minimum resistivity of 1.01×10-3 Ω·cm was achieved at 0.933 Pa, the corresponding average transmittance and Eg were 79.7% and 3.82 eV. The AZO films in this work were beneficial to the TCO application.
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Published: 05 July 2019
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| About author:: Xiaokun Zhao received his Ph. D. degree in materials science and engineering in University of Science and Technology Beijing in 2014, and B.S. degree in materials science and engineering in China University of Geosciences (Beijing) in 2009. He is currently wor-king at NICE Solar Energy Ltd, member of China Energy Investment Corporation. His research interests are functional materials, new energy materials.Boyan Li received his Ph.D. degree in microelectro-nics and solid state electronics in Nankai University in 2012. He is currently working at NICe Solar Energy Ltd, as manager of R & D department. His research has focused on thin film photovoltaic technology.Zengguang Zhang received his Ph. D. degree in physical chemistry from Graduate School of Chinese Academy of Sciences in 2011. His research has focused on R & D and application of copper indium gallium diselenide thin film solar cell. |
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1 Ellmer K. Nature Photonics, 2012, 6, 809.
2 叶志镇, 吕建国, 张银珠, 等. 氧化锌半导体材料掺杂技术与应用, 浙江大学出版社,2009.
3 Liu J, Zhang W J, Song D Y, et al. Ceramics International,2014,40(8),12905.
4 Sun Y H, Wang H L, Chen J, et al. Transactions of Nonferrous Metals Society of China,2016,26(6),1655.
5 Berasategui E G, Zubizarreta C, Bayón R, et al. Surface and Coatings Technology,2015,271,141.
6 He B, Xu J, Xing H Z, et al. Superlattices and Microstructures,2013,64,319.
7 Kim H R, Kim J B, Choi Y S, et al. Surface and Coatings Technology,2014,259,39.
8 Zubizarretaa C, Berasateguia E G, Ciarsoloa I, et al. Applied Surface Scie-nce,2016,380,218.
9 Ghorannevis Z, Akbarnejad E, Salarelahi A, et al. Journal of Crystal Growth,2016,447,62.
10 Prepelita P, Craciun V, Garoi F. Applied Surface Science,2015,352,23.
11 Miao D G, Zhao H M, Li A S, et al. Ceramics International,2015,41(6),8235.
12 Thornton J A. Journal of Vacuum Science & Technology,1974,11(4),666.
13 Kluth O, Schü pe G, Hüpkes J, et al. Thin Solid Films,2003,442 (1-2),80.
14 Chen J, Sun Y H, Lv X, et al. Applied Surface Scienc,2014,317,1000.
15 Wang F, Wu M Z, Wang Y Y, et al. Vacuum,2013,89,127. |
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