空心微球上Al-W多层涂层的制备与表征

doi:10.11896/j.issn.1005-023X.2018.24.016

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Abstract In the research of inertial confinement fusion, high-low Z metal coating is vital to the performance of target. Tilt rotating tray and knocking device were applied in this experiment by DC magnetron sputtering technology. The Al-W multilayer coa-tings with different working pressure were deposited on GDP hollow microspheres. And using scanning electron microscopy, atomic force microscopy and X-ray diffractometer to study the effect of working pressure on the quality of the multilayer coatings. The results show that the uniformity of thickness of the multilayer coating is better which is more than 90%. And the coating has a compact columnar crystal growth model with small residual stress. The working pressure has significant influence on the quality of the coa-tings. The density of structure decreased with pressure increased. At the same time, the morphology and particle size of the coating changes. All of which has result a similar variation tendency of the surface roughness corresponding to the surface particles. A ten-dency decreased first and then increased when the working pressure increase. Especially, when the working pressure is 0.5 Pa, the Al-W coating has the best comprehensive performance. Its surface morphology is of small homogeneous pyramid-shape and surface roughness value is as low as 331.1 nm.

Key words： Al-W multilayer coating working pressure uniformity of wall thickness columnar crystal surface roughness

Published: 23 January 2019

CLC number:

TQ153.2

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	Articles by authors
	SUN Shubing
	LIU Yansong
	HE Xiaoshan
	WANG Feng
	HE Zhibing
	HUANG Jinglin
	LIU Lei

Cite this article:

SUN Shubing,LIU Yansong,HE Xiaoshan, et al. Preparation and Characterization of Aluminum-Tungsten Coatings on Hollow Microspheres[J]. Materials Reports, 2018, 32(24): 4297-4302.

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http://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2018.24.016 OR http://www.mater-rep.com/EN/Y2018/V32/I24/4297

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