Materials Reports  2021, Vol. 35 Issue (z2): 60-63    
INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
Effect of Work Pressure on Microstructure and Properties of Magnetron Sputtering TaN Coatings
ZHANG Yubao, LI Zhigang, WANG Yi, JIANG Jicheng, YAO Gang, ZHAO Hongtao
Heilongjiang Institute of Atomic Energy, Harbin 150086, China