ZnS溅射功率对Cu<sub>2</sub>ZnSnS<sub>4</sub>薄膜附着性及太阳电池性能的影响

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Abstract The stacking precursors SLG/Mo/ZnS/SnS/Cu were sputtered ZnS, SnS and Cu target in sequence on soda-lime glass (SLG) substrates in which the sputtering power of ZnS changed from 50 W to 140 W. Then Cu₂ZnSnS₄ (CZTS) thin films were obtained by annealing. The effects of ZnS sputtering powers on the morphology, microstructure and adhesion in ZnS thin films and followed CZTS thin films were investigated. The results showed that the ZnS thin films with different power sputtering were hexagonal wurtzite with (008) preferred orientation. The poor crystallization in ZnS thin film was found at low sputtering power. The compressive stress in ZnS thin film increased by an order of magnitude with sputtering power from 50 W to 140 W. When sputtering power of ZnS was lower than 80 W or higher than 110 W, the crack and even falling off phenomenon were observed in the annealed CZTS thin films. From 80 W to 110 W, the surface of CZTS thin film was even but more holes and se-condary phases appeared at higher power of 110 W. The CZTS solar cell was prepared with ZnS thin films sputtered at 80 W, which showed open circuit voltage of 572 mV, short circuit current density of 14.23 mA/cm² and photoelectric conversion efficiency of 3.34%.

Key words： Cu₂ZnSnS₄ ZnS stress adhesive property

Published: 25 November 2019

CLC number:

TM914.4

Fund:This work was financially supported by the National Natural Science Foundation of China (61774130, 11474248, 61176127, 61006085), the Applied Basic Research Plan of Yunnan Province (2017FD069).

About author:: Lu Wang, received her master’s degree in Yunnan Normal University. She is mainly engaged in the research of Cu₂ZnSnS₄ thin film solar cells.
Jie Guo, Yunnan Normal University, associate professor, received his Ph.D. degree in the Northwestern Polytechnical University. He is mainly engaged in the research of infrared detection technology.
Ruiting Hao, Yunnan Normal University, professor, received his Ph.D. degree in the Institute of Semiconductors, Chinese Academy of Sciences. He is mainly engaged in the research of infrared detection technology.

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	WANG Lu
	GUO Jie
	HAO Ruiting
	Gu Kang
	LIU Bin
	WANG Yuanfangzhou
	SUN Shuaihui

Cite this article:

WANG Lu,GUO Jie,HAO Ruiting, et al. Influence of ZnS Sputtering Power on Cu₂ZnSnS₄ Thin Film Adhesion andPerformance of Solar Cells[J]. Materials Reports, 2019, 33(Z2): 24-27.

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http://www.mater-rep.com/EN/ OR http://www.mater-rep.com/EN/Y2019/V33/IZ2/24

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