xBiInO3-(1-x)PbTiO3薄膜的横向压电特性

doi:10.11896/cldb.18060105

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Abstract In recent years, the application of piezoelectric films in surface acoustic waves and piezoelectric devices has received extensive attention and research. This paper focuses on the transverse piezoelectric properties of La doping xBiInO₃-(1-x)PbTiO₃ thin films. The effective transverse piezoelectricities of xBiInO₃-(1-x)PbTiO₃ films were studied experimentally by multilayer cantilevers. Under the applied sinusoidal voltage, the tip vibration amplitudes of the xBiInO₃-(1-x)PbTiO₃ multilayer cantilevers were measured experimentally by laser Doppler vibrometer, and the effective transverse piezoelectric coefficients of the films with different x and La doping can be evaluated according to the theory of Euler-Bernoulli cantilever and piezoelectric equations. Therefore, the optimized properties of the films can be obtained by properly controlling La doping contents.

Key words： RF magnetron sputtering deposition thin films effective transverse piezoelectricity cantilever

Published: 19 June 2019

CLC number:	TB34
	TB79
	O426.4

Fund:This work was financially supported by the National Natural Science Foundation of China (11304160) and the NUPTFC (NY215111).

About author:: Kexue Sunreceived the Ph.D. degree in acoustics from the Institute of Acoustics, School of Physics at Nanjing University, Nanjing, China, in 2018. He is currently an associate professor and master supervisor at Nanjing University of Posts and Telecommunications. He engaged in the teaching and research of analog electronic technology, digital circuits and systems, FPGA technology and applications, electrical and electronic experiments, optoelectronic information materials and devices and so on. As a researcher, he participated in and completed more than ten projects, includes the National Natural Science Foundation of China,
the Natural Science Foundation of Jiangsu Province, etc. He has published more than 50 journal papers, applied 12 national invention patents, and 3 of them were authorized.

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Cite this article:

SUN Kexue,CHANG Yuexin,CHENG Xiefeng. Transverse Piezoelectric Properties of xBiInO₃-(1-x)PbTiO₃ Thin Films[J]. Materials Reports, 2019, 33(14): 2299-2304.

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http://www.mater-rep.com/EN/10.11896/cldb.18060105 OR http://www.mater-rep.com/EN/Y2019/V33/I14/2299

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