石英玻璃微流道超声振动磨削加工及流动阻力特性研究

doi:10.11896/cldb.22040004

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Abstract Quartz glass microfluidic chips have broad application prospects in the fields of medical diagnosis, biochemical analysis and drug screening. The processing quality of high-performance quartz microchannel directly determines the performance of microfluidic chips. In this work, the ultrasonic vibration grinding technology was used to process the quartz glass microchannel efficiently and precisely. First, the effects of the spindle speed N, feed speed v_f, grinding depth a_p and the ultrasonic power P on the surface quality and shape accuracy of the microchannel were studied. Then the ultrasonic vibration grinding process parameters were optimized. Finally, the water flow resistance of the microchannel was tested to study the influences of the hydraulic diameter of the microchannel on flow resistance characteristics. The experimental results of ultraso-nic vibration grinding show that the surface roughness R_a of the quartz glass microchannel can reach a minimum value of 0.191 μm, the shape accuracy RMS value and PV value can reach 3.332 μm and 23.783 μm, respectively. The surface morphology of microchannel is integrated with smooth bottom microscopic surface and regular edges without obvious breakage. The experimental results of the fluidity test show that the frictio-nal resistance coefficient of the flow in the quartz glass microchannel decreases with the increase of Reynolds number and hydraulic diameter. Therefore, when designing the microchannel, a larger hydraulic diameter should be selected and the flow rate should be appropriately increased.

Key words： ultrasonic vibration grinding micro-channel surface roughness form accuracy resistance characteristics

Published: 10 September 2023 Online: 2023-09-05

CLC number:

TH161

Fund:National Natural Science Foundation of China (51805334) and the National Taipei University of Technology-Shenzhen University Joint Research Program (2020002).

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	Articles by authors
	GUO Mingrong
	LU Yanjun
	CHEN Runhua

Cite this article:

GUO Mingrong,LU Yanjun,CHEN Runhua. Study on Ultrasonic Vibration Grinding and Flow Resistance Characteristics of Quartz Glass Micro-channel[J]. Materials Reports, 2023, 37(17): 22040004-7.

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http://www.mater-rep.com/EN/10.11896/cldb.22040004 OR http://www.mater-rep.com/EN/Y2023/V37/I17/22040004

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