Materials Reports  2022, Vol. 36 Issue (12): 21050197-9     https://doi.org/10.11896/cldb.21050197
POLYMERS AND POLYMER MATRIX COMPOSITES |
Preparation and Performance Analysis of Gel-forming Diamond Abrasive Polishing Disc for Polishing SiC Wafer
FENG Kaiping1,2, LYU Binghai2, WANG Shuai3, ZHAO Tianchen1, ZHOU Zhaozhong1
1 School of Mechanical Engineering, Quzhou University, Quzhou 324000,Zhejiang, China
2 School of Mechanical Engineering, Zhejiang University of Technology,Hangzhou 310014, China
3 School of Mechanical Engineering, Zhejiang University,Hangzhou 310012, China