低气压下N型晶硅太阳电池P型发射极的两步扩散法制备研究

doi:10.11896/cldb.21050044

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Abstract Solar cells have become an important part of clean energy. Under the background of the international policy of carbon peak and carbon neutral, vigorously developing clean energy technology isa fundamental method to solve the energy and environment problems. N-type solar cells have the advantages of large impurity tolerance and long minority carrier lifetime, which are more beneficial to improve the conversion efficiency of the cell and reduce the cost. It is the mainstream of the high-efficiency crystalline silicon solar cells. However, the separation coefficient of boron atom is much higher than that of phosphorus atom, which makes the boron diffusion process more difficult than phosphorus diffusion. Based on these, two-step diffusion method were adopted under a low pressure to study the influence of process parameters such as the gas flow rate, the pre-deposition time and the redistribution time on the square resistance and the uniformity of diffusion sheet. The physical mechanism of the minority carrier life decay of the N-type cells after boron diffusion was analyzed, and the properties of the prepared N-type cells were characterized. Finally, the square resistance inhomogeneity of the P-type emitter is improved less than 4% under the optimized process. And these results provide an important technical reference for the preparation of the high-efficiency N-type solar cells.

Key words： N-type crystalline silicon solar cell P-type emitter two-step diffusion

Published: 25 November 2022 Online: 2022-11-25

CLC number:

TM914.4+1

Fund:Key R & D Projects in Ningxia(2018BEE03002,2018BEB04027),the National Natural Science Foundation of China(12164035,51801107), the Fourth Batch of Ningxia Youth Talent Supporting Project(TJGC2019002)and University Student Innovation Project(2021107490232).

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	Articles by authors
	MA Xiaobo
	CAO Zhijie
	SHEN Hongjun
	FAN Kai
	KANG Xinxin
	MI Jinhui

Cite this article:

MA Xiaobo,CAO Zhijie,SHEN Hongjun, et al. Study on Preparation of P-type Emitter for N-type Crystalline Silicon Solar Cell by Two-step Diffusion Process Under Low Pressure[J]. Materials Reports, 2022, 36(22): 21050044-5.

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http://www.mater-rep.com/EN/10.11896/cldb.21050044 OR http://www.mater-rep.com/EN/Y2022/V36/I22/21050044

1 Smith K D, Gummel H K, Bode J D, et al.Bell System Technical Journal, 1963, 3, 1765.
2 Fischer H, Pschunder W.In:10th IEEE Photo-voltaic Specialists Confe-rence. Palo Alto, 1973, pp.404.
3 Schmidt J, Aberle A G, Hezel R. In:26th IEEE Photovoltaic Specialists Conference. Las Vegas, 1997, pp.13.
4 Yang Z J, Shen H.Materials Reports B:Research Papers, 2010, 24(4), 126.
杨灼坚, 沈辉. 材料导报:研究篇, 2010, 24(4), 126.
5 Macdonald D, Geerlings L J.Applied Physics Letters, 2004, 85(18), 4061.
6 Ding D, Lu G L, Li Z P, et al.Solar Energy, 2019, 193(15), 494.
7 Zhang S, Meng F Y, Søndenå R, et al.Energy Procedia, 2017, 124, 321.
8 Michael R, Ages M, Udo R, et al.Energy Procedia, 2016, 92, 412.
9 Wang P Q, Sridharan R, Ng X R, et al.Solar Energy Materials and Solar Cells, 2021, 220(110834), 1.
10 Yin H P, Tang K, Zhang J B, et al.Solar Energy Materials and Solar Cells, 2020, 208(110345), 1.
11 Ma X B, Zhang W J, Zhang W, et al.Materials Science in Semiconductor Processing, 2017, 61, 93.
12 Ryu K, Madani K, Rohatgi A, et al.Current Applied Physics, 2018, 18, 231.
13 Lerat J F, Desrues T, Perchec J L, et al.Energy Procedia, 2016, 92, 697.
14 Huang Y Y, Ok Y W, Madani K, et al.Solar Energy Materials and Solar Cells, 2020, 214(110585), 1.
15 Singha B, Solanki C S.Materials Today: Proceedings, 2018, 5, 23477.
16 Monna R, Sanzone V, Diaz J, et al.Energy Procedia, 2016, 92, 479.
17 Komatsu Y, Mihailetchi V D, Geerligs L J, et al.Solar Energy Materials & Solar Cells, 2009, 93(6), 750.
18 Liu A Y, Yan D, Phang S P, et al.Solar Energy Materials and Solar Cells, 2018, 179, 136.
19 Yu J. Study on emitter optimization mechanism and electrical properties of polycrystalline solar cells. Master's Thesis, University of Electronic Science and Technology of China, China,2012(in Chinese).
俞健. 多晶太阳能电池发射极优化机理及电性能研究. 硕士学位论文, 电子科技大学, 2012.
20 He G T. Study on diffusion process of crystalline silicon solar cell. Master's Thesis, University of Electronic Science and Technology of China,China,2009(in Chinese).
何堂贵. 晶体硅太阳电池制作中的扩散工艺研究. 硕士学位论文, 电子科技大学, 2009.