化学气相沉积法制备高纯硼粉的技术进展

doi:10.11896/cldb.19080205

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Abstract High purity boron is an important material for high-tech and electronic information. It is an important strategic material indispensable for military and high-tech. In this paper, hydrogen and boron halide, boron halide, borane respectively on the surface of metal substrate, boron rod substrate and chemical vapor deposition by fluidized bed technique to prepare boron powder were expounded. The advantages and disadvantages of each method were analyzed and compared. High-yield and high purity boron powder by using borane and introducing fluidized bed technology was prepared. The method of recovery of by-products was discussed, and a method of combing of fluidized bed with chemical vapor deposition (FB-CVD) to produce economic, industrial high purity boron powder was further proposed.

Key words： high purity boron borane fluidized bed chemical vapor deposition

Published: 12 March 2021

CLC number:

TQ128

About author:: Jing Zeng graduated from Hunan University in June 2013 with a master’s degree. Now she is working at China Institute of Atomic Energy and mainly engaged in the research of boron materials.
Shilin Hu is the director of the Research Office of China Institute of Atomic Energy. He is mainly responsible for special materials researching work. In 2000, he was awarded of “Young Academic Leaders” of China Institute of Atomic Energy. In 2009, he was named as “Model Worker of Central Enterprise Labor” and “Touching Atomic Science City” top ten people. In 2014, he was named “the most beautiful Chinese nuclear person”. In 2015, he was awarded the honorary title of “National Model Worker”. At the same time, he was awarded the ho-
norary title of “Young and Middle-aged Expert with Outstanding Contribution”. In 2019, he won the “Qian Sanqiang Technology Award”. He is currently the chief expert of CNNC. He has won the second prize of National Science and Technology Progress Award; the first prize of National Defense Science and Technology Progress Award; the third prize of Science and Technology Progress of CNNC; the first prize of Science and Technology Progress Award of CNNC; the Major Scientific and Technological Achievement Award of CNNC and other awards.

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	ZENG Jing
	HU Shilin
	WU Quanfeng
	QI Xin
	ZHOU Wenhui

Cite this article:

ZENG Jing,HU Shilin,WU Quanfeng, et al. A Technological Review of the Preparation of High Purity Boron Powder by Chemical Vapor Deposition[J]. Materials Reports, 2021, 35(5): 5089-5094.

URL:

http://www.mater-rep.com/EN/10.11896/cldb.19080205 OR http://www.mater-rep.com/EN/Y2021/V35/I5/5089

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