氧化铁刻蚀金刚石表面形貌的表征及形成机理

doi:10.11896/cldb.19070180

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Abstract In order to systematically study the characterization and formation mechanism of surface morphology on diamond etched by Fe₂O₃ powder at different temperatures, using synthetic diamond as etching material and Fe₂O₃ powder as etching agent, the diamond was washed first, then Fe₂O₃ was mixed with diamond in a weight ratio of 5∶1 by milling in a ball-mill and tightly compacted, finally, the surface of diamond single crystal was etched by Fe₂O₃ at 650—850 ℃ with nitrogen as protective atmosphere respectively. The surface morphology, surface roughness, phase composition and etching mechanism of etched diamond single crystals were characterized and analyzed by means of scanning electron microscope and 3D reconstruction, thermogravimetric analysis, X-ray diffraction and Raman spectroscopy. Moreover, the morphology of different crystal planes of etched diamond was observed by 3D rescontruction technique for the first time, and the bending strength of Cu-matrix bonded diamond sample was prepared to evaluate the effect of etching on the bonding force between diamond and metal matrix. The results show that Fe₂O₃ can etch diamond single crystal well at different temperatures, and the degree and morphology of etching on different crystal planes are anisotropic, and when the etching temperature is 650 ℃, Fe₂O₃ has etched diamond single crystal to a certain extent. The etching rate of {100} and {111} plane increases as the temperature increasing,and that {100} plane was etched more severely than {111} plane under the same conditions.The surface roughness S_a of {100} plane increases from 0.84 μm to 3.73 μm, while the surface roughness S_a of {111} plane increases from 0.77 μm to 2.01 μm. After etching, the surface morphology of the etched diamond reflect the arrangement of carbon atoms on the corresponding plane. When the etching temperature rises from 650 ℃ to 850 ℃, the etched pit of {100} plane changes from quadrilateral to octagonal, and the {111} plane is slightly punctate into a triangular conical bulge. The mechanism of Fe₂O₃ etching diamond single crystal is the oxidation process of diamond. Furthermore, after etching, the flexural strength of Cu-matrix bonded diamond sample is greatly improved.

Key words： diamond single crystal Fe₂O₃ temperature anisotropy etching surface roughness mechanism

Published: 14 July 2020

CLC number:

TG732

Fund:This work was financially supported by the Natural Science Project of Zhengzhou Science and Technology Bureau (20150246).

About author:: Changjiang Xiaoreceived his B.E. degree in chemistry from Zhengzhou University in 1994 and received his Ph.D. degree in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences, in 2007. His research interests are functional materials and synthetizing new materials under high pressure.

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	XIAO Changjiang
	DOU Zhiqiang
	ZHU Zhendong

Cite this article:

XIAO Changjiang,DOU Zhiqiang,ZHU Zhendong. Characterization and Formation Mechanism of Surface Morphology on Diamond Etched by Fe₂O₃ Powder[J]. Materials Reports, 2020, 34(14): 14045-14050.

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http://www.mater-rep.com/EN/10.11896/cldb.19070180 OR http://www.mater-rep.com/EN/Y2020/V34/I14/14045

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