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An Overview of SiGe Selective Etching Technology Used for the Preparation of Gate-All-Around Transistor
LIU Enxu, LI Junjie, LIU Yang, YANG Chaoran, ZHOU Na, LI Junfeng, LUO Jun, WANG Wenwu
Materials Reports . 2024, (
9
): 22110004 -7 . DOI: 10.11896/cldb.22110004
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