功率超声对无掩膜定域性电沉积三维镍质微结构成型过程的影响

doi:10.11896/cldb.23110271

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Abstract Improving the forming accuracy of three-dimensional metal microstructures with high aspect ratio has always been a research focus in microelectronic information manufacturing, MEMS and other fields. In the deposition process of mask-less localized electrodeposition (MLED) of micro-nickel pillars with diameter of 60 μm and aspect ratio of 8∶1, power ultrasound of certain strength, in the same direction to the electric field, was applied for exploring the influence of magnetic field on forming process of three-dimensional nickel microstructure in MLED. A comparative study of the average volumetric deposition rate, surface morphology and grain size during MLED of micro-nickel pillars without and under action of power ultrasound was carried out. The results show that the power ultrasound may increase the average volumetric deposition rate of MLED to 28%—39% compared to without power ultrasonic action, and the the highest average volumetric deposition rate was 15 340.46 μm³/s;at the same time, the effect of power ultrasound may further refine the grain size of sedimentary bodies, and the average grain size may reach 46.37 nm. Furthermore, the power ultrasound may improve the cylindricity and the microscopic surface morphology of micro-nickel pillars to a certain extent during MLED.

Key words： power ultrasound mask-less localized electrodeposition(MLED) three-dimensional nickel microstructure forming process

Published: 10 January 2025 Online: 2025-01-10

CLC number:

TQ153.1

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	Articles by authors
	WU Menghua
	JIANG Bingchun
	XIAO Yuqing
	JIA Weiping

Cite this article:

WU Menghua,JIANG Bingchun,XIAO Yuqing, et al. Effect of Power Ultrasound on Forming Process of Three-dimensional Nickel Microstructure in Mask-less Localized Electrodeposition[J]. Materials Reports, 2025, 39(1): 23110271-6.

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https://www.mater-rep.com/EN/10.11896/cldb.23110271 OR https://www.mater-rep.com/EN/Y2025/V39/I1/23110271

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