力电多场鼓包法测定PZT铁电薄膜的横向压电系数<sup>*</sup>

doi:10.11896/j.issn.1005-023X.2017.015.021

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Abstract On the measuring of transverse piezoelectric coefficients of Pb(Zr_0.52Ti_0.48)O₃ (PZT) thin films, we derived the mechano-electrical coupling bulge constitutive equations of PZT thin films on the basis of bulge test model and ferroelectric constitutive equations. The bulge samples were prepared by sol-gel and chemical etching methods. Mechano-electrical coupling bulge tests were performed by using modified force-electric experimental platform under the applied voltage between 0—14 V. The results showed that the elastic modulus and residual stress of PZT thin films were 91.9 GPa and 36.2 MPa under pure force field, respectively. The transverse piezoelectric coefficients d₃₁ of PZT thin films increased from -28.9 pm/V to -45.8 pm/V when the voltage increased from 2 V to 14 V. Our work provides an effective analysis method for the transverse piezoelectric properties of other ferroelectric thin film materials by using the modified mechano-electrical coupling bulge test and the corresponding constitutive equations.

Key words： transverse piezoelectric coefficient bulge test mechano-electrical coupling constitutive equation Pb(Zr_0.52Ti_0.48)-O₃ thin films

Published: 10 August 2017 Online: 2018-05-04

CLC number:

O341

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	Articles by authors
	HE Yuandong
	SUN Changzhen
	MAO Weiguo
	MAO Yiqi
	ZHANG Honglong
	CHEN Yanfei
	PEI Yongmao
	FANG Daining

Cite this article:

HE Yuandong,SUN Changzhen,MAO Weiguo, et al. Measurement of Transverse Piezoelectric Coefficients of Pb(Zr_0.52Ti_0.48)O₃ Thin Films by a Mechano-electrical Multiphysics Coupling, Bulge Test Method[J]. Materials Reports, 2017, 31(15): 139-144.

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https://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2017.015.021 OR https://www.mater-rep.com/EN/Y2017/V31/I15/139

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