磁控溅射高温固体自润滑涂层的研究与进展<sup>*</sup>

doi:10.11896/j.issn.1005-023X.2017.03.006

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Abstract In recent years, high temperature solid self-lubricanting coating has been developed rapidly in many fields. Micro-nano scale high temperature solid self-lubricanting coating prepared by magnetron sputtering technology can meet the requirements of coating thickness, mechanical properties and friction performance for aeronautical applications. On the basis of consulting a large amount of references at home and abroad, progress of corresponding material systems, optimization of magnetron sputtering process parameters and coating structure design for the high temperature solid self-lubricating coating were reviewed. By analyzing the inf-luential mechanism of coating composition, process improvement measures and complex interface structure, the problem of further research of high temperature solid self lubricant coating was put forward.

Key words： high temperature solid self-lubrication magnetron sputtering coating structure

Published: 10 February 2017 Online: 2018-05-02

CLC number:

TB31

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	CHEN Yajun
	YU Jiaqi
	ZHAO Jieyu
	WANG Fusheng

Cite this article:

CHEN Yajun,YU Jiaqi,ZHAO Jieyu, et al. Research and Development of High Temperature Solid Self-lubricanting Coating Prepared by Magnetron Sputtering[J]. Materials Reports, 2017, 31(3): 32-37.

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https://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2017.03.006 OR https://www.mater-rep.com/EN/Y2017/V31/I3/32

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