用于蓝宝石材料加工的新型超精密抛光技术及复合抛光技术研究进展

doi:10.11896/j.issn.1005-023X.2018.09.009

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Abstract Ultra-precision polishing is a process that reduces surface roughness and achieves high surface quality and surface integrity. Sapphire is a typical hard and brittle materials with poor processability, and thereby the traditional polishing techniques are prone to cause damage such as surface fragmentation and surface scratches uncontrollable quality fluctuation, as well as low proces-sing efficiency. This paper summarizes the principles and characteristics and research status of the techniques of magnetorheological polishing, hydration polishing, chemical mechanical polishing and laser polishing which apply to sapphire materials and analyzes the advantages and disadvantages of each polishing technique from the perspectives of surface quality, polishing agent and polishing liquid, efficiency and cost. We also introduce the development of the composite polishing techniques for sapphire material, and outline the future prospect of the ultra-precision polishing techniques for sapphire material.

Key words： sapphire material ultra-precision polishing material removal mechanism chemical mechanical polishing

Published: 06 July 2018

CLC number:

TN305.1

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	HU Yangxuan
	DENG Zhaohui
	WAN Linlin
	LI Min

Cite this article:

HU Yangxuan,DENG Zhaohui,WAN Linlin, et al. Research Progress of the Novel Ultra-precision Polishing Techniques and Composite Polishing Techniques for Sapphire Material Processing[J]. Materials Reports, 2018, 32(9): 1452-1458.

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http://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2018.09.009 OR http://www.mater-rep.com/EN/Y2018/V32/I9/1452

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