高精准度检测紧固件轴向预紧力的薄膜压电传感器的研究

doi:10.11896/cldb.21080201

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Abstract The health monitoring of structural has received considerable attention in the industrial field, especially for accurate detection and monitoring of pre-tightening force of fastener at key parts. High performance piezoelectric transducer is the core component to realize high-accuracy and nondestructive pre-tightening detection of fastener with ultrasonic. In this work, the preparation process and related piezoelectric transducer pro-perties of zinc oxide (ZnO) piezoelectric thin films were studied in detail. The cross-sectional morphology, surface roughness, crystal orientation and piezoelectric response properties of ZnO films under different deposition power were characterized. The results showed the ZnO films under the deposition power of 250 W display a stronger preferential growth along c-axis orientation and better piezoelectric properties. ZnO-based thin film piezoelectric transducer was then successfully deposited onto the surface of GH4169 bolt. Under operating conditions of 100 V pulse square wave voltage and 30 dB signal gain, an amplitude exceeding 200 of the first ultrasonic longitudinal wave with frequency of 17.71 MHz was obtained for the ZnO piezoelectric transducer. When the bolt rated preload was more than 60%, a preload control accuracy of ±3% was achieved for the ZnO piezoelectric transducer.

Key words： piezoelectric thin film transducer zinc oxide (ZnO) ultrasonic nondestructive measurement high accuracy

Published: 10 April 2023 Online: 2023-04-07

CLC number:

TN384

Fund:Sichuan Science and Technology Program (2019JDJQ0044, 2020YFG0380).

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	Articles by authors
	HE Xulin
	YE Qinyan
	LUO Kun
	ZHENG Xingping
	RAN Xiaolong
	LIAO Cheng

Cite this article:

HE Xulin,YE Qinyan,LUO Kun, et al. Research on Thin Film Piezoelectric Transducer for High-accuracy Axial Pre-tightening Detection of Fastener[J]. Materials Reports, 2023, 37(7): 21080201-4.

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http://www.mater-rep.com/EN/10.11896/cldb.21080201 OR http://www.mater-rep.com/EN/Y2023/V37/I7/21080201

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