氧化铝陶瓷表面连续导电金膜的制备工艺及性能

doi:10.11896/cldb.20010151

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Abstract Two methods of magnetron sputtering and screen printing were used to prepare conductive Au films on the Al₂O₃ ceramics surface. Under different parameters, Au films with different thicknesses were prepared by the controlled variable method. A systematic and in-depth study of the two preparation processes was carried out. Through the high-precision resistance measuring instrument, scanning electron microscope (SEM), and energy dispersive spectrometer (EDS), the conductive properties and micro-morphology of Au film before and after heat treatment were studied. The roughness of Au film surface was characterized by Confocal laser scanning microscope (CLSM). The results show that the nano-Au prepared by magnetron sputtering has a conductive film thickness threshold of 30 nm, and its film has a small change in the roughness of the substrate surface. After the nano-Au film is heat-treated at 600 ℃, Au undergoes solid state wetting, resulting in a sharp increase in its resistance value and a decrease in its electrical conductivity. By the method of screen printing, the conductive Au film is obtained by screen printing with a 200-mesh and the Au content of 40wt%, and the cost can be significantly reduced.

Key words： magnetron sputtering screen printing Au film conductivity

Published: 10 May 2021

CLC number:

O484.1

Fund:National Key R & D Project of China (2017YFB0310400), National Natural Science Foundation of China (51572112), Open Fund of State Key Laboratory of Advanced Refractories (SKLAR201903).

About author:: Xincheng Liu, currently studying for a master's degree in the School of Materials Science and Engineering, Jiangsu University, is mainly engaged in the research of electrode film construction and pressure sensor devices.
Haicheng Shao, Senior Engineer School of Materials Science and Engineering, Jiangsu University. Graduated from Xi'an Jiaotong University in November 2013 with a doctorate degree in materials science. Since joining the Institute of Inorganic Materials and Devices of Jiangsu University in June 2014, he has been mainly engaged in the research of ceramic/metal composite materials and pressure sensor technology research and development. Now he focuses on the preparation, characterization, and application research of ceramic capacitive pressure sensors. He has published dozens of articles in important domestic and foreign journals, and applied for more than 10 invention patents.

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	LIU Xincheng
	SHAO Haicheng
	QIAO Guanjun
	LU Haojie
	YU Liuxu
	ZHANG Xiangzhao
	LIU Guiwu

Cite this article:

LIU Xincheng,SHAO Haicheng,QIAO Guanjun, et al. Preparation Process and Performance of Continuous Conductive Au Film on Surface of Al₂O₃ Ceramic[J]. Materials Reports, 2021, 35(8): 8076-8081.

URL:

http://www.mater-rep.com/EN/10.11896/cldb.20010151 OR http://www.mater-rep.com/EN/Y2021/V35/I8/8076

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