Materials Reports  2020, Vol. 34 Issue (Z1): 29-33 |
| INORGANIC MATERIALS AND CERAMIC MATRIX COMPOSITES |
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| Microstructure of the Second Phase In4Sn3O12 and Its Effect on Properties ofITO Target Materials |
| XIE Bin1, YANG Shuo1, WANG Weining2, XI Yulin1
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1 Luoyang Ship Material Research Institute, Luoyang 471023, China;
2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China |
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Abstract ITO target materials with different SnO2 content were prepared by injection molding using self-made nano ITO gasification powder as raw mate-rial. The target materials with 10% (mass fraction) SnO2 content were sintered at different sintering temperatures. The microstuctuer of ITO target materials with different SnO2 content and the quantity, morphology and distribution of the second phase in the target materials were analyzed by SEM. The results show that at the sintering temperature of 1 575 ℃, with the increased SnO2 content, the target grains were refined, and the number of the second phase at the intersection of grain boundaries was significantly increased; as the sintering temperature increased to 1 600 ℃, the second phase at the boundary decomposed and transfered to the parent phase. The target with 10% SnO2 content sintered at 1 575 ℃ was corroded by aqua regia to extract the second phase. The composition, phase structure and thermogravimetry of the second phase were analyzed by EDS, XRD, TEM and TGA. The research indicates that the second phase formed at the intersection of grain boundary of ITO target with 10% SnO2 content is the hexagonal In4Sn3O12 phase, and the oxygen content of target is related to In4Sn3O12. Based on the analysis of density, resistivity and thermal diffusivity of ITO target with different SnO2 content, the influence of the second phase on the target performance was indirectly studied. It was found that the increase of SnO2 content was beneficial to the increase of target density, while the increase of target resistivity, the increase of oxygen content and the decrease of thermal diffusivity.
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Published: 01 July 2020
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| Fund:This work was financially support by the National R & D and Industrialization Project for Rare Earth and Rare Metallic New Materials (20121743). |
| About author:: Bin Xie, received his M.S. degree in materials from Xi'an University of Science and Technology, and he is currently an Engineer in Luoyang Ship Material Research Institute (LSMRI). He is mainly engaged in the preparation of nano-powders and functional ceramics ; Yulin Xi received his Ph.D. degree in materials from Xi'an Jiaotong University, and he is currently a professor in Luoyang Ship Material Research Institute (LSMRI). His research interests are preparation of functional ceramics and metal matrix composites. |
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