Materials Reports  2019, Vol. 33 Issue (Z2): 580-583 |
| POLYMERS AND POLYMER MATRIX COMPOSITES |
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| Preparation of 300 nm PI Self-supporting Film Using KrF Laser Ablation |
| LIU Renchen, LU Jing
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| Physics Center of Zhuhai College, Jilin University, Zhuhai 519041 |
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Abstract To discuss the preparation of micro-nano polyimide (PI) self-supporting film, polyamic acid (PAA) solution were synthesized by using pyro-mellitic dianhydride and 4,4′-oxydianiline as monomers. Then 900 nm self-supporting PI film acquired through thermal imidization and demolding. Degree of imidization was investigated with Fourier transform infrared (FT-IR) spectroscopy, surface morphology was observed by projective microscope. Results showed that ZnO thin film sputtered less than 250 ℃ was the optimum demolder and KrF excimer laser (wavelength: 248 nm) etched PI film 110 pulses at 45 mJ/cm2 laser fluence, 300 nm self-supporting PI film would be acquired.
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Published: 25 November 2019
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| Fund:This work was financially supported by the Key Research Platforms and Research Projects of Guangdong Province (2018KTSCX306), Key Projects of Zhuhai College Jilin University(2018XJCQSQ047), Higher Education Teaching Research and Reform Project (ZLGC20191004, 2019JZDJ034). |
| About author:: Renchen Liu received his Ph.D. degree in physics science and engineering from Tongji University in Sep. 2010—Sep. 2013. He has published more than 20 journal papers as the first author, applied 2 national invention patents and one of them was authorized. His research interests focus on the thin film silicon solar cells and micron-nano structure fabrication, etc. |
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