化学气相沉积法较低温度下制备层状硫化钼薄膜的研究

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Abstract MoS₂ is 2D layered transition metal dichalcogenides (TMDs), which has a layered structure similar to graphene, has been widely investigated. MoS₂ will turn to a direct band gap semiconductor with a bandgap as high as 1.9 eV when reduced to a single-layered structure, and it also has a strongly enhanced photoluminescence effect and excellent nano- and opto-electronic properties, this makes single layer MoS₂ a promising material for the next generation of nanoelectronics and optoelectronics and also a potential material for highly efficient photo catalytic H₂ generation. As for preparation, chemical vapor deposition has been the most commonly used method for layered MoS₂ growth. However, it is usually performed under a high temperature ranged around 850—1 000 ℃, which is very energy consumed. Here we explored the relatively low temperature situation, and have grown layered MoS₂ films by chemical vapor deposition under the temperature under 650 ℃, 675 ℃, 700 ℃, 725 ℃ and 750 ℃. The as prepared samples were characterized with optical microscope (OM) and Raman spectroscopy. The results show that MoS₂ can be grown under a temperature even low as 650 ℃, and the MoS₂ triangles grown under 725 ℃ have the largest average area and the best morphology. The results of this experiment show that it is possible to grow MoS₂ few layered films under a relatively low temperature, which would save more energy and be economic.

Key words： chemical vapor deposition layered MoS₂ Raman spectroscopy 2D layered materials

Published: 05 July 2019

CLC number:

O649

About author:: Wenjing Su, received his M.S. degree in June 2011 from Ningbo Institute of Materials Technology & Engineering,CAS, and now work in (CNBM) Bengbu Design ＆ Research Institute for Glass Industry Co.,Ltd/State Key Laboratory for Advanced Technology of Float Glass as a materials research & develop engineerZhiping Gan is director of Film Technology Institute in State Key Laboratory for Advanced Technology of Float Glass, he has ever undertaken projects of Anhui Natural Science Foundation and recently his research interest mainly focuses on functional film materials.

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	SU Wenjing
	JIN Liangmao
	JIN Kewu
	WANG Tianqi
	TANG Yongkang
	GAN Zhiping

Cite this article:

SU Wenjing,JIN Liangmao,JIN Kewu, et al. Study on Layered MoS₂ Films Grown by Chemical Vapor Deposition at Relatively Low Temperatures[J]. Materials Reports, 2019, 33(z1): 158-160.

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http://www.mater-rep.com/EN/ OR http://www.mater-rep.com/EN/Y2019/V33/Iz1/158

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