元素掺杂对ITO薄膜材料性能影响的微观机制及研究进展
张亦文, 宋晚晴, 张士雨, 谢贵久, 季惠明
Microscopic Mechanism and Research Progress of the Effects of Element Doping on the Properties of ITO Thin-film Materials
ZHANG Yiwen, SONG Wanqing, ZHANG Shiyu, XIE Guijiu, JI Huiming
材料导报
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2022, (23): 21010015
-9
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DOI: 10.11896/cldb.21010015