Abstract: The effect of the form of SiO2 on the morphology of synthesized silicon oxynitride was investigated when it was used as the oxidant. The fumed silica and crystalline quartz powders were used respectively, and the average particle size of silicon powders was 1.15 μm. Phase analysis was carried out with an X-ray diffractometer, and morphology observation was performed with a scanning electron microscope. The results show that when fumed silica was used as the oxidant, silicon oxynitride fibers were obtained when mixtures of oxidant and silicon powders were held at 1 380 ℃ for 4 h, and the molar ratio of oxidant to silicon was in the range of 2.0∶1—2.6∶1. When crystalline quartz was used as the oxidant, granular silicon oxynitride particles were obtained by hol-ding the mixture at 1 450 ℃ for 4 h, with the molar ratio of silicon to quartz fixed at 1.5∶1. The mechanisms for the formation of silicon oxynitride of different morphology were discussed, with the aid of thermodynamics analysis of the Si-N-O system.
1 Ohashi M, Tabata H, Kanzaki S. High-temperature flexural strength of hot-pressed silicon oxynitride ceramics[J]. J Mater Sci Lett, 1988,7(4):339. 2 Wang S Q, Yan Y H. Properties, preparation and application of the silicon oxynitride powder and ceramics[J].China Ceram, 1998,34(1):42(in Chinese). 王思青, 闫玉华. 氮氧化硅粉末及陶瓷的性能、制备与应用[J]. 中国陶瓷, 1998,34(1):42. 3 Xie R J, Mitomo M, Xu F F, et al. Microstructure and mechanical properties of superplastically deformed silicon nitride-silicon oxynitride in situ composites[J]. J Eur Ceram Soc, 2002,22(6):963. 4 Martin C, Ndzogha C, Rancoule G, et al. Development of various crucible coating concepts for crystallization of multi crystalline silicon ingots [C]//23rd European Photovoltaic Solar Energy Conference. Valencia, Spain, 2008. 5 刘茜, 周遥, 周虎,等. 抗氧化陶瓷用棒状Si2N2O粉体及其制备方法: 中国, CN103508455A[P]. 2014-01-15. 6 Zhang J B, Lei T Q, Wen G W, et al. Research progress in synthesis of silicon oxynitride [J]. Mater Sci Technol, 2001,9(4):434(in Chinese). 张俊宝, 雷廷权, 温广武, 等. 氮氧化硅合成研究进展[J]. 材料科学与工艺, 2001,9(4):434. 7 Li X, Zhang L, Yin X. Study on in-situ reaction synthesis and mechanical properties of Si2N2O ceramic [J]. Ceram Int, 2013,39(3):3035. 8 Wu S, Li X. Preparation of pure nano-grained Si2N2O ceramic[J]. Int J Refractory Metals Hard Mater, 2013,36:97. 9 Nie J H, Qiu W D, Li W F, et al. Synthesis of silicon oxynitride[J]. Rare Metal Mater Eng, 2013,42:879. 10Nie J H, Wen J, Qiu W D, et al. Effect of temperature and holding time on synthesized silicon oxynitride[J]. Rare Metal Mater Eng, 2015(S1):475(in Chinese). 聂建华,文晋,邱文冬,等. 温度和保温时间对合成氧氮化硅的影响[J]. 稀有金属材料与工程, 2015(S1):475. 11Yin C Q, Li B, Wei X Q, et al. Study on synthesis of silicon oxynitride powders from wire sawdusts of silicon[J]. J Synth Cryst, 2015,44(10):2739(in Chinese). 尹传强, 李兵, 魏秀琴, 等. 利用硅片线锯屑合成氮氧化硅粉体研究[J]. 人工晶体学报, 2015,44(10):2739. 12Li B, Yin C Q, Wei X Q, et al. Synthesis of silicon oxynitride from silicon sawdust and quartz[J]. J Synth Cryst, 2016,45(4):892(in Chinese). 李兵, 尹传强, 魏秀琴, 等. 以硅片线锯屑和石英为原料合成氮氧化硅粉体研究[J]. 人工晶体学报, 2016,45(4):892. 13Fegley M B. The thermodynamic properties of silicon oxynitride[J]. J Am Ceram Soc, 1981,64(9):124. 14叶大伦, 胡建华. 实用无机物热力学数据手册[M]. 第2版. 北京: 冶金工业出版社, 2002. 15Giridhar R V, Rose K. Conditions for thermal nitridation of Si in N2-O2 mixtures[J]. J Electrochem Soc, 1988,135(11):2803. 16Pavarajarn V. Roles of gas and solid components in the direct nitridation of silicon [D]. US: Oregon State University,2002. 17Yin C Q. A study on synthesis of silicon nitride series powders from silicon kerfs[D]. Nanchang: Nanchang University, 2015(in Chinese). 尹传强. 利用硅片线锯屑合成高纯氮化硅系列粉体研究[D].南昌: 南昌大学, 2015. 18Jennings H M. On reactions between silicon and nitrogen[J]. J Mater Sci, 1983,18(4):951.
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2017, Vol. 31 
